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Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type


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EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F

Features
    ・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
    ・Energy saving
    　The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
    　Power consumption: Max. 65% reduction
    　Facility water: Max. 67% reduction
    ・High performance
    　Temperature stability: ±0.1°C (When a load is stable)
    　Cooling time: Max. 46% reduction (SMC comparison)
    ・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
  • EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
    Manual
    Series View search result
    HRZ-FView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRZ-F-20 to 40℃
10 to 60℃
-20 to 90℃		2 kW, 4 kW, 8 kW, 10 kW±0.1℃Water-cooled
refrigeration		Fluorinated fluids
Ethylene glycol aqueous solution
Tap water/Deionized water

Water-cooled Thermo-chiller/High-performance Type HRW

    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)		Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Thermo-chiller/High-performance Type HRZ

This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.

    ・Suitable for semiconductor processing equipment with a wide variety of
    　features, such as high-temperature stability, a wide temperature range,
    　failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
  • Thermo-chiller/High-performance Type HRZ
    DoC
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃		1 kW, 2 kW,
4 kW, 8 kW		±0.1℃Water-cooled refrigerationFluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water

Low GWP Refrigerant Chiller/Refrigerated Thermo-chiller HRZF

Features
    · Low GWP refrigerant chiller
    　GWP:146∗ ∗ Regulation (EU) 2024/573, AIM Act 40 CFR Part 84
    　　EU refrigerant regulations: GWP150 or more
    　　US refrigerant regulations: GWP700 or more
    　　California, US refrigerant regulations: GWP750 or more
    · Environmentally friendly R454C as refrigerant (Not available for air
    　transport)
    · More effective energy-saving is achieved through use of a DC inverter
    　compressor and an inverter pump.
  • Low GWP Refrigerant Chiller/Refrigerated Thermo-chiller HRZF
    Manual
    Series Cooling capacity View search result
    HRZF01010kWView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZF010-20〜90℃10kW±0.1℃Water-cooled refrigerationFluorinated fluids, 60% ethylene glycol aqueous solution

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