Product Information »
WEB Catalog
» High Vacuum Equipment
» High Vacuum Valves
WEB Catalog
Product List
- Air Management System
-
Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
- Direct Operated 3/4/5 Port Solenoid Valves
- Reduced-wiring Fieldbus System (Serial Transmission System)
- Wireless System
- Air Operated Valves
- Mechanical Valves/Transmitters
- Finger Valve/Hand Valves/Residual Relief 3 Port Valve
- Blow Guns
- Power Valves
- ISO Valves
- Explosion-Proof Valves
-
Air Cylinders
- Standard Air Cylinders (Round Type)
- Standard Air Cylinders (Square Cover)
- Compact Air Cylinders
- Environment Resistant Cylinders
- Floating Joints/Rod End
- Air-hydro Units
- Mechanically Jointed Rodless Cylinders
- Magnetically Coupled Rodless Cylinders
- Table Cylinders
- Guide Cylinders
- Dual Rod Cylinders
- Lock Cylinders/Cylinder with An End Lock
- Fine Lock Cylinders
- Specialty Cylinders
- Clamp Cylinders
- Pin Shift Cylinder
- Stopper Cylinders
- Stroke Reading Cylinders
- Valve Mounted Air Cylinders
- ISO Cylinders
- Shock Absorbers
- Auto Switches
- Actuator Position Sensor
- Flow Control Equipment
- Rotary Actuators/Air Grippers
-
Electric Actuators/Cylinders
- e-Actuator
- Manifold Controller/Manifold Controller Compatible Electric Actuator
- Battery-less Absolute Encoder Type
- Slider Type
- Rod Type/Guide Rod Type
- Slide Tables
- Miniature
- Rotary Tables
- Grippers
- Grippers for Collaborative Robots
- Controllers/Drivers
- Environment
- Motorless Type
- Electric Cylinders
- Card Motor
- Made to Order
- Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Grippers for Collaborative Robots
- Compact Compressor
- Air Preparation Equipment
- Modular F.R.L./Pressure Control Equipment
- Modular F.R.L. Units
- Pressure Control Equipment
- Booster Regulators
- Lubrication Equipment
- Fittings and Tubing
- Flow Control Equipment
- Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
- Switches/Sensors/Controller
-
Static Neutralization Equipment
- Static Neutralization Equipment Ionizer Bar Type
- Static Neutralization Equipment Nozzle Type Ionizer
- Static Neutralization Equipment Fan Type Ionizer
- Static Neutralization Equipment Ionizer Gun
- Static Neutralization Equipment Desktop Duster Box
- Static Neutralization Equipment Electrostatic Sensor/Sensor Monitor/Meter
- Static Neutralization Equipment/Ionizers
-
Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: EtherCAT Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
- Process Valves
- Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Industrial Filters/Sintered Metal Elements
- Process Pumps(Diaphragm Pumps)
-
Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Chiller Compliant Regulations
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
- Hydraulic Equipment
- Process Gas Equipment
Theme
-
Clean Series/Low-Particle Generation
- Directional Control Valves
- Air Cylinders
- Rotary Actuators
- Air Grippers
- Air Dryers
- Compressed Air Cleaning Filter Series
- Clean Gas Filters/Air Filters
- Exhaust Cleaner for Clean Room/Clean Exhaust Filter
- Modular F.R./Pressure Control Equipment
- Fittings
- Tubing
- Flow Control Equipment
- Switches/Sensors
- Flow Switch
- Electric Actuators
- High Vacuum Equipment
- Fluoropolymer Equipment/PVC Equipment
- Pneumatic Instrumentation Equipment
- Copper, Fluorine-free Equipment Series 20-
- ISO Products
- Arc Welding Process Equipment
-
Series Compatible with Secondary Batteries Series 25A-
- Directional Control Valves
- Actuators
- Related Products
- Rotary Actuators/Air Grippers
- Vacuum Equipment
- Air Preparation Equipment/Clean Air Filters
- ModularF.R.L./Pressure Control Equipment
- Flow Control Equipment/Fittings
- Tubings
- Detection Switches/Auto Switches
- Process Valves
- Process Gas Equipment
- Electric Actuators
- List of ATEX Compliant Products
- IO-Link Devices
High Vacuum Valves
Stainless Steel High Vacuum Angle/In-line Valve XM/XY
-
・The precision casting, unified composition prevents the accumulation of gas.
・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.
Note) Size 16 is not available for the in-line type.
-
2D/3D CAD
The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.
Click here for 2D/3D CAD2D CAD
Click here for 2D CAD Stainless Steel High Vacuum Angle/In-line Valve XM/XY
Manual
Series View search result XMA/XYA View search result XMC/XYC View search result XMD/XYD View search result XMH/XYH View search result
Safety Instructions System Configuration/Series Variations Auto Switches Common Specifications
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
---|---|---|---|---|---|
XMA/XYA | Air operated | Bellows seal | Single acting (N.C.) | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 80 Note) |
XMC/XYC | Air operated | Bellows seal | Double acting | Body : SCS13 (Eequivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 80 Note) |
XMD/XYD | Air operated | Bellows/O-ring seal | Single acting (N.C.) | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 25 to 80 |
XMH/XYH | Manual | Bellows seal | Manual | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 50 Note) |