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Other: RS232C Compatible Products

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Electro-Pneumatic Regulator ITV

    ・Stepless control of air pressure in proportion to electrical signals
    ・Sensitivity: 0.2 kPa (100 kPa specification)
    ・Linearity: ±1% or less (F.S.)
    ・Hysteresis: 0.5% or less (F.S.)
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C, IO-Link

     ▶IO-Link Master
SeriesPort sizeSet pressure (MPa)
ITV0000Built-in One-touch fitting
φ4,φ5/32
0.001 to 0.1
0.001 to 0.5
0.001 to 0.9
ITV10001/8,1/40.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV20001/4,3/80.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV30001/4,3/8,1/20.005 to 0.1
0.005 to 0.5
0.005 to 0.9

Electronic Vacuum Regulator ITV

    ・Stepless control of vacuum pressure in proportion to electrical signals
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C
SeriesPort sizeSet pressure (MPa)
ITV009□Built-in One-touch fitting
φ4,φ5/32
-1 to -100
ITV209□1/4-1.3 to -80

Thermo-chiller/Standard Type HRS

    ・With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
    ・For a wide range of applications, such as laser machine tools, analytical equipment,
     LCD manufacturing equipment, mold temperature control, etc.
    ・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
    ・Timer function, Low liquid level protection, Power failure auto-restart,
     Anti-freezing function, etc.
    ・Self diagnosis function
    ・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
    ・Compliant with UL Standards, CE-marking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Standard Type HRS
    Manual
    Series View search result
    HRS012 to 060View search result
  • Thermo-chiller/Standard Type HRS-E
    DoC
    Series View search result
    HRS012 to 060View search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRS012 to 0605 to 40℃1.3 kW
1.9 kW
2.4 kW
3.2 kW
4.2 kW
5.1 kW
5.9 kW
(60 Hz)
±0.1℃Air-cooled refrigeration
Water-cooled refrigeration
Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Environmentally Resistant Type HRS-R

    ・Resistant to dust and water splashing
    ・Protection of the electrical unit: IP54
    ・Metal panel
     The entire exterior surface is metal.
     A stainless steel panel can be selected. (Option)
    ・A large capacity tank (12 L) is available. (Option)
    ・Ambient temperature: 5 to 45°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    Manual
    Series View search result
    HRS-RView search result
  • Thermo-chiller/Environmentally Resistant Type HRS-R-E
    DoC
    Series View search result
    HRS-RView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRS-R5 to 40℃1.9 kW
2.9 kW
5 kW
(60 Hz)
±0.1℃Air-cooled refrigerationTap water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Standard Type HRS090

    ・Lightweight and compact
    ・Cooling capacity: 9 kW
    ・Temperature stability: ±0.5°C
    ・Set temperature range: 5 to 35°C
    ・Max. ambient temperature: 45°C
    ・Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC, 460 to 480VAC
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Standard Type HRS090
    Manual
    Series View search result
    HRS090View search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRS0905 to 35℃9kW (60Hz)±0.5℃Air-cooled refrigeration
Water-cooled refrigeration
Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Standard Type HRS100/150

    ・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
    ・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
    ・Low-noise design: 70 dB (A)
    ・Outdoor installation: IPX4
    ・Compact, Space saving
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Standard Type HRS100/150
    Manual
    Series View search result
    HRS100
    HRS150
    View search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRS100
HRS150
5 to 35℃9.5 kW
14.5 kW
(60 Hz)
±1.0℃Air-cooled refrigeration
Water-cooled refrigeration
Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Standard Type HRS200

    ・3-phase 380 to 415 VAC (50 Hz), 3-phase 460 to 480 VAC (60 Hz)
    ・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
    ・Outdoor installation: IPX4
    ・Compact, Space saving

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRS2005 to 35℃20.5 kW±1.0℃Air-cooled refrigerationTap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Inverter Type HRSH090

    ・Power consumption reduced by 53%
     Complete with energy-saving triple inverter!
    ・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
    ・Temperature stability: ±0.1°C
    ・Set temperature range: 5°C to 40°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Inverter Type HRSH090
    Manual
    Series View search result
    HRSH090View search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRSH0905 to 40℃9.5 kW±0.1℃Air-cooled refrigeration
Water-cooled refrigeration
Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Inverter Type HRSH

    ・Complete with energy-saving triple inverter!
    ・Outdoor installation, Splashproof type (IPX4)
    ・Max. ambient temperature: 45℃
    ・Min. ambient temperature: –20℃ (For the air-cooled type)
    ・Temperature stability: ±0.1℃ (When a load is stable)
    ・Space saving and lightweight: 280 kg (25 kW type)
    ・Compliant with UL Standards, CE-marking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Inverter Type HRSH
    Manual
    Series View search result
    HRSHView search result
  • Thermo-chiller/Inverter Type HRSH-E
    DoC
    Series View search result
    HRSHView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRSH5 to 35℃10 kW
15 kW
20 kW
25 kW
28 kW
±0.1℃Air-cooled refrigeration
Water-cooled refrigeration
Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL

    ・Temperatures for 2 fluid channel systems can be controlled individually by one chiller.
    ・Space saving, Reduced wiring
     Footprint: 22% reduction
     One power supply system for 2 channels
    ・Energy saving
     Power consumption reduced by 30%
    ・Touch panel
    ・Power supply: 3-phase 380 to 415 VAC (50/60 Hz)
             3-phase 460 to 480 VAC (60 Hz)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
    Manual
    Series View search result
    HRL100
    HRL200
    HRL300
    View search result
  • Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL-E
    DoC
    Series View search result
    HRL100
    HRL200
    HRL300
    View search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRL100
HRL200
HRL300
CH1: 15 to 25℃
CH2: 20 to 40℃
CH1:9 kw, 19 kW, 26 kW
CH2: 1.0 kW (Max. 1.5 kW)
CH1: ±0.1
CH2: ±0.5
Air-cooled refrigerationTap water, Deionized water

Thermo-chiller/Rack Mount Type HRR

    ・Operable without the need to remove the unit from the rack
     Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
    ・Space saving: Multiple chillers can be mounted to a 19-inch rack.
    ・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
    ・Temperature stability: ±0.1℃
    ・Global power supply:
     Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
     Single-phase 200 to 230 VAC (50/60 Hz)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Rack Mount Type HRR
    Manual
    Series View search result
    HRRView search result
  • Thermo-chiller/Rack Mount Type HRR-E
    DoC
    Series View search result
    HRRView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRR5 to 35℃
15 to 35℃
1.1 kW
1.2 kW
1.8 kW
2.4 kW
3.0 kW
5.1 kW
±0.1℃Air-cooled refrigeration
Water-cooled refrigeration
Tap water
Ethylene glycol aqueous solution (15%)

EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F

    ・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
    ・Energy saving
     The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
     Power consumption: Max. 65% reduction
     Facility water: Max. 67% reduction
    ・High performance
     Temperature stability: ±0.1°C (When a load is stable)
     Cooling time: Max. 46% reduction (SMC comparison)
    ・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
  • EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
    Manual
    Series View search result
    HRZ-FView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRZ-F-20 to 40℃
10 to 60℃
-20 to 90℃
2 kW, 4 kW, 8 kW, 10 kW±0.1℃Water-cooled
refrigeration
Fluorinated fluids
Ethylene glycol aqueous solution
Tap water/Deionized water

Thermo-chiller/High-performance Type HRZ

    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

    ∗ The HRZ series will be discontinued in December 2022.
     Please select the HRZ-F series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series View search result
    HRZView search result
  • Thermo-chiller/High-performance Type HRZ-E
    DoC
    Series View search result
    HRZView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃
1 kW, 2 kW, 4 kW, 8 kW±0.1℃Water-cooled
refrigeration
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Thermo-chiller/High-performance Inverter Type HRZ

    ・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
    ・A wide temperature range and cooling capacity range are covered by one unit.
    ・Suited to the short innovation cycle of semiconductor equipment,
     Capable of responding flexibly to changes in the process conditions
    ・Compliant with UL Standards, SEMI Standards, CE-marking

    ∗ The HRZ series will be discontinued in December 2022.
     Please select the HRZ-F series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/High-performance Inverter Type HRZ
    Manual
    Series View search result
    HRZView search result
  • Thermo-chiller/High-performance Inverter Type HRZ-K-E
    DoC
    Series View search result
    HRZView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRZ−20 to 90℃
10 to 60℃
10 kW±0.1℃Water-cooled
refrigeration
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Dual Thermo-chiller/High-performance Inverter Type HRZD

    ・Temperatures for 2 systems can be controlled separately by one chiller.
    ・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump.
    ・Space saving: Footprint reduced by 23%
    ・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
    ・Compliant with SEMI Standards, CE-marking
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRZD−30 to 90℃9.5 kW x 2±0.1℃Water-cooled
refrigeration
Fluorinated,
Ethylene glycol aqueous solution (60%)

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