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Air Cylinder 10-/11-/21-/22-CG1-Z

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
Standard10-/11-/21-/22-CG1-ZDouble acting, Single rod20，25，32，40，50，63，80，100
Standard10-/11-CG1W-Z　21-/22-CG1WDouble acting, Double rod20，25，32，40，50，63，80，100
Direct mount10-/11-CG1R-Z　21-/22-CG1RDouble acting, Single rod20，25，32，40，50，63

4/5 Port Solenoid Valve 10-SYJ

Clean Series/Low-Particle Generation » Directional Control Valves

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions　Green Procurement (RoHS)
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SYJ30000.46dm3(s・bar)φ250.35
10-SYJ50000.83dm3(s・bar)φ400.35
10-SYJ70002.9dm3(s・bar)φ500.35

Reinforced Corrugated Cardboard Specification/Longer Length Reel: FEP Tubing (Fluoropolymer) TH0604-X64

Pneumatic Instrumentation Equipment » Piping Materials
    ・Length per roll: 500/250 m
    ・Operating temperature: 200℃
    ・Compatible with the Food Sanitation Law.
Green Procurement (RoHS)
SeriesTube size Tubing
O.D. ×Tubing I.D.		Fluid
TH0604-X64φ6×φ4Air, Water, Inert gas

NAMUR Interface 3/5-Port Solenoid Valve IP67 Compliant, Hygienic Design Type VFN2120N-X23/-X36

Pneumatic Instrumentation Equipment » Solenoid Valves
    ・A hygienic design has been adopted.
    　Resin body with less concaves
    　Direct cleaning of the valve is possible. (IP67)
    ・3-port/5-port valves are available.
    　Due to the function plate, 3/5-port valves are selectable.
    ・Low power consumption
    　Power consumption: 0.5 W
    ・Port threads: NPT1/4, G1/4
Safety Instructions　Automation Example　Specific Product Precautions　Green Procurement (RoHS)
SeriesFlow rate characteristics
(Cv/Effective area)		Manual overrideType of coil insulationPower consumption (W)
VFN2120N-X23/-X360.8/11mm2Push type
Locking type (Tool required)
Locking type (Manual type)		Class B0.5

Aluminum High Vacuum Angle Valve XL□

High Vacuum Equipment » High Vacuum Valves
Features
    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
    　discontinued in September 2017.
    　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLAAir
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		100・160
XLAV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		100・160
XLCAir
operated		Double
acting		Bellows sealDust-free
Cleaned		100・160
XLCV
(With solenoid valve)		Air
operated		Double
acting		Bellows sealDust-free
Cleaned		100・160
XLFAir
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		（80）・100・160
XLFV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		（80）・100・160
XLGAir
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		100・160
XLGV
(With solenoid valve)		Air
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		100・160
XLDAir
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLDV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLHManualManualBellows sealDust-free
Cleaned		16 to 50
XLSElectromagneticSingle
acting
(N.C.)		(Bellows balance)For portable equipment not
requiring air		16, 25

Diaphragm Valve for Ultra High Purity AP

Process Gas Equipment » Process Gas Equipment
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations　Valve and Regulator Recommendations　Technical Data/Glossary of Terms　Green Procurement (RoHS)
SeriesDescriptionTypeBody material
APFor Ultra High PurityAir Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityManually Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityMetering Valve316L SS secondary remelt
AZFor Ultra High PurityAir Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityManually Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityMetering ValveSUS316L
AKFor General ApplicationsAir Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsManually Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsMetering ValveSUS316

Thermo-chiller/Environmentally Resistant Type HRS-R

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・Resistant to dust and water splashing
    ・Protection of the electrical unit: IP54
    ・Metal panel
    　The entire exterior surface is metal.
    　A stainless steel panel can be selected. (Option)
    ・A large capacity tank (12 L) is available. (Option)
    ・Ambient temperature: 5 to 45°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    Manual
    Series View search result
    HRS-RView search result
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    DoC/IM
    Series View search result
    HRS-RView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS-R5 to 40℃1.9 kW
2.9 kW
5 kW
(60 Hz)		±0.1℃Air-cooled refrigerationTap water
Ethylene glycol aqueous solution (15%)

2-Layer Soft Fluoropolymer Tubing TQ

Process Valves » Valves for Water and Chemical Base Fluids
Features
    ・Carries fluid such as solvent with a soft and abrasion resistant tube.
    ・2-layer structure
    　Outer layer: Special nylon resin
    　Inner layer: Special fluoropolymer
    ・Internal smoothness: Equivalent to Ra 0.02 μm
Safety Instructions　Fittings and Tubing/Precautions　Green Procurement (RoHS)
SeriesTubing O.D.
Metric size		ColorFluid
TQφ4, φ6, φ8, φ10, φ12Translucent (Material color)Air, Water, Inert gas, Solvent

2 Port Solenoid Valve (2 Way Valve) with Built-in Y-strainer VXK

Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
    ・For air, water, oil, steam
    ・Space saving with reduced piping labor
    ・Built-in strainer
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 2 Port Solenoid Valve (2 Way Valve) with Built-in Y-strainer VXK
    DoC/IM
    Series View search result
    VXK21/22/23View search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VXK21/22/23N.C./N.O.1/8 to 3/82 to 8

Ionizer IZS31

Static Neutralization Equipment » Static Neutralization Equipment Ionizer Bar Type
    ・Static neutralization time: 0.3 sec
    ・Select from 3 types of sensors.
    ・Rapid neutralization of static electricity by a feedback sensor
    ・Offset voltage control by an auto balance sensor
    ・High precision type: Accurately controls the offset voltage of the work position
    ・Body attachment type: Can be used while attached to the ionizer body by
    　detecting the earth return current
    ・The cartridge can be selected according to the application.
    ・The high-speed static neutralization type focuses on the speed of static neutralization.
    ・The low maintenance type improves the maintenance cycle.
Safety Instructions　Green Procurement (RoHS)
SeriesIon generation methodIon balance
IZS31Corona discharge type±30 V
(Stainless steel electrode needle : ±100 V)

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