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Non-contact Gripper XT661
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Special PadsEquipment for the Semiconductor Industries » Slit Valve/Transfer
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・Assists in non-contact workpiece transfer
・Max. workpiece suction distance: 10 mm
・2 types are available:
Cyclone type: High lift: Max. 44 N
Bernoulli type: Amplitude of the workpiece during gripping: ±0.01 mm or less
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Oval Vacuum Pad (Vacuum Suction Cup) ZP/ZP2
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Pads (Vacuum Suction Cups)
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・For rectangular, vertically long, and horizontally long workpieces
・Pad form: Oval flat type
・Mounting: Male thread, Female thread
・Vacuum inlet direction: Vertical, Lateral
・Vacuum inlet: Male thread, Female thread, One-touch fitting, Barb fitting
・Buffer: Without, With
Buffer stroke (mm): [ZP] 6, 10, 15, 20, 25
Buffer stroke (mm): [ZP2] 10, 20, 30, 40, 50
Safety Instructions Vacuum Equipment/Precautions Vacuum Pads/Precautions Series Variations Model Selection ZP: Mounting Bracket Assembly (p.189-194) ZP2: Mounting Bracket Assembly (p.195-197) Green Procurement (RoHS)
Series | Pad form | Pad diameter(mm) |
---|---|---|
ZP | Oval flat type | 2×4, 3.5×7, 4×10 |
ZP2 | Oval flat type | 3.5×7, 4×10, 4×20, 4×30, 5×10, 5×20, 5×30, 6×10, 6×20, 6×30, 8×20, 8×30 |
Vacuum Filter AFJ
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Related Equipment for Vacuum SystemsVacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters
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・Prevents problems with vacuum equipment!
・Nominal filtration rating: 5, 40, 80 μm
・Large flow capacity: Max. 660 L/min (ANR)
・Elements can be reused by washing them.
・Water droplets can be removed.
・The bowl is covered with a transparent bowl guard.
Series | Port size | Recommended flow rate L/min (ANR) | Filtration |
---|---|---|---|
AFJ | 1/8,1/4,3/8,1/2 | 180,380,660 | 5,40,80 |
In-line Type Vacuum Ejector ZU□A
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors-
・Compact and Lightweight
O.D.: ø10.4, Weight: 3.9 g, Overall length: 52 mm
・Port size
ø4, ø6 One-touch fitting, Rc1/8 female thread, ø5/32″
・Vacuum pressure reached [kPa]
Type S: -90, -87, -85
Type L: -48, -40
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] Type S | Max. suction flow [L/min(ANR)] Type L | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) |
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ZU03□A | 0.3 | 1.8 | 3.4 | 4.2 | 2 to 8 |
ZU04□A | 0.4 | 3.2 | 5.8 | 7.7 | 2 to 10 |
ZU05□A | 0.5 | 7 | 13 | 14 | 2 to 13 |
ZU07□A | 0.7 | 11 | 16 | 28 | 2 to 20 |
Electric Actuator/High Rigidity Slider Type LEJ
Electric Actuators/Cylinders » Motorless Type-
・Various servo motors can be mounted due to the addition of the motorless type.
・Compatible motors:
Mitsubishi Electric Corporation, YASKAWA Electric Corporation,
SANYO DENKI CO., LTD., OMRON Corporation, Panasonic Corporation,
FANUC CORPORATION, NIDEC INSTRUMENTS,
KEYENCE CORPORATION, FUJI ELECTRIC CO., LTD., MinebeaMitsumi Inc.,
Shinano Kenshi Co., Ltd., ORIENTAL MOTOR Co., Ltd., FASTECH Co., Ltd.,
Rockwell Automation, Inc. (Allen-Bradley), Beckhoff Automation GmbH,
Siemens AG, Delta Electronics, Inc., ANCA Motion
Safety Instructions Electric Actuators/Precautions Auto Switches/Precautions
Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
Specification | Model | Stroke (mm) | Work load (kg) | Speed (mm/s) | Screw lead (mm) |
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Motorless Ball screw drive | LEJS40 | 200 to 1200 | Max. 55 | Max. 1800 | 8, 16, 24 |
Motorless Ball screw drive | LEJS63 | 300 to 1500 | Max. 85 | Max. 1800 | 10, 20, 30 |
Electric Actuator/High Rigidity Slider Type, Ball Screw Drive 11-LEJS
Clean Series/Low-Particle Generation » Electric ActuatorsElectric Actuators/Cylinders » Environment

Clean Series
・Low profile/Low center of gravity: Height reduced by approx. 36% (Reduced by 32 mm)
・Max. work load: 85 kg
・Positioning repeatability: ±0.02 mm
・Max. acceleration/deceleration: 20000 mm/s2
・Clean room specification
・Motorless specification is available. Click here for details
Safety Instructions Electric Actuators/Precautions Auto Switches/Precautions Features
Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
CE/UL-compliance List
Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
CE/UL-compliance List
Specification | Model | Stroke (mm) | Work load (kg) Horizontal | Speed (mm/s) | Screw lead (mm) |
---|---|---|---|---|---|
AC servo motor | 11-LEJS40 | 200 to 1200 | Max. 55 | Max. 1200 | 8,16 |
AC servo motor | 11-LEJS63 | 300 to 1500 | Max. 85 | Max. 1200 | 10,20 |
Electric Actuator/Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5
Electric Actuators/Cylinders » Environment
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・Enclosure: IP65 equivalent
・Max. stroke: 500 mm
Safety Instructions Electric Actuators/Precautions Auto Switches/Precautions Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
CE/UL-compliance List Actuator Cable I/O Cable
CE/UL-compliance List Actuator Cable I/O Cable
Specification | Model | Stroke (mm) | Pushing force (N) | Speed (mm/s) | Screw lead (mm) |
---|---|---|---|---|---|
Step motor (Servo/24 VDC) | LEY25-X5 | 30 to 400 | Max. 452 | Max. 400 | 3, 6, 12 |
Step motor (Servo/24 VDC) | LEY32-X5 | 30 to 500 | Max. 707 | Max. 400 | 4, 8, 16 |
Servo motor (24 VDC) | LEY25A-X5 | 30 to 400 | Max. 130 | Max. 400 | 3, 6, 12 |
AC servo motor | LEY25S-X5 | 30 to 400 | Max. 485 | Max. 900 | 3, 6, 12 |
AC servo motor | LEY32S-X5 | 30 to 500 | Max. 588 | Max. 1200 | 5, 10, 20 |
AC servo motor | LEY63□□-□P | 100 to 800 | Max. 1910 | Max. 1000 | 5, 10, 20 |
AC servo motor (In-line motor type) | LEY25DS-X5 | 30 to 400 | Max. 485 | Max. 900 | 3, 6, 12 |
AC servo motor (In-line motor type) | LEY32DS-X5 | 30 to 500 | Max. 736 | Max. 1000 | 4, 8, 16 |
AC servo motor (In-line motor type) | LEY63D□□-□P | 100 to 800 | Max. 1910 | Max. 1000 | 5, 10, 20 |
Programless Controller LECP1
Electric Actuators/Cylinders » Controllers/Drivers
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・No programming required
Capable of setting up an electric actuator operation without using a PC or
teaching box
・Speed/acceleration 16-level adjustment
・Compatible with actuators with locks
・3-level pushing force settings
The LECP1 and LECP2 series programless controllers are to be discontinued
as of the end of May 2025.
Consider selecting the JXC51/61 series single-axis controller instead, as it
has interchangeable functions.
* The most recent versions of the JXC51/61 series (Ver. 3.60 and up) and the
ACT Controller 2 setting software (Ver. 1.5.0.0) are required in order to use
the LECP1/LECP2 mode.
▶Click here for details.
Safety Instructions Electric Actuators/Precautions Features
Series Variations Simplified Selection Flow Chart Wiring Method
Green Procurement (RoHS)
Series Variations Simplified Selection Flow Chart Wiring Method
Green Procurement (RoHS)
Type | Series | Compatible motor | Power supply voltage | Parallel I/O Input | Parallel I/O Output | Number of step data |
---|---|---|---|---|---|---|
Programless type | LECP1 | Step motor (Servo/24 VDC) | 24 VDC ±10% | 6 (Photo-coupler isolation) | 6 (Photo-coupler isolation) | 14 points |
Electric Gripper 2-Finger Type (F Type) LEHF
Electric Actuators/Cylinders » Grippers
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・Easy setting: Data can be set with only 2 items, position and force.
The controller is already set with the data of the actuator.
(The actuator and controller are provided as a set.)
・Equipped with a drop prevention function
(All series come equipped with a self-lock mechanism.)
・The self-lock mechanism reduces power consumption.
・Equipped with a gripping check function
・It is possible to set the position, speed, and force. (64 points)
Note) ( ): For long strokes
Safety Instructions Electric Actuators/Precautions Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS) CE/UL-compliance List Actuator Cable I/O Cable
Series | Body size | Open and close stroke/ both sides (mm) | Gripping force [N] Basic | Gripping force [N] Compact | Opening and closing speed (mm/s) |
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LEHF | 10 | 16(32)Note) | 3 to 7 | 3 to 7 | 5 to 80 |
LEHF | 20 | 24(48)Note) | 11 to 28 | 11 to 28 | 5 to 100 |
LEHF | 32 | 32(64)Note) | 48 to 120 | 48 to 120 | 5 to 100 |
LEHF | 40 | 40(80)Note) | 72 to 180 | 72 to 180 | 5 to 100 |
Electric Actuator/Slider Type, Belt Drive LEFB
Electric Actuators/Cylinders » Slider Type
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LEFB Series Step Motor (Servo/24 VDC), Servo Motor (24 VDC)
・Max. stroke: 2000 mm
・Max. speed: 2000 mm/s
・Positioning repeatability: ±0.08 mm
LEFB Series AC Servo Motor
・Max. speed: 2000 mm/s
・Max. stroke: 3000 mm
・Max. acceleration/deceleration: 20000 mm/s2
・Pulse input type/With internal absolute encoder
・Positioning repeatability: ±0.06 mm
・Motorless specification is available. Click here for details
・Compatible drivers: Click here for LECSS-T,LECY□
Safety Instructions Electric Actuators/Precautions Auto Switches/Precautions
Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
CE/UL-compliance List Actuator Cable I/O Cable
Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
CE/UL-compliance List Actuator Cable I/O Cable
Specification | Model | Stroke (mm) | Work load (kg) Horizontal | Speed (mm/s) | Equivalent lead (mm) |
---|---|---|---|---|---|
Step motor (Servo/24 VDC) | LEFB16 | 300 to 1000 | 1 | 48 to 1100 | 48 |
Step motor (Servo/24 VDC) | LEFB25 | 300 to 2000 | 10 | 48 to 1400 | 48 |
Step motor (Servo/24 VDC) | LEFB32 | 300 to 2000 | 19 | 48 to 1500 | 48 |
Servo motor (24 VDC) | LEFB16A | 300 to 1000 | 1 | 5 to 2000 | 48 |
Servo motor (24 VDC) | LEFB25A | 300 to 2000 | 2 | 5 to 2000 | 48 |
AC servo motor | LEFB25S | 300 to 2000 | 5 | Max. 2000 | 54 |
AC servo motor | LEFB32S | 300 to 2500 | 15 | Max. 2000 | 54 |
AC servo motor | LEFB40S | 300 to 3000 | 25 | Max. 2000 | 54 |