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5 Port Solenoid Valve 10-SY
Clean Series/Low-Particle Generation » Directional Control Valves
Clean Series
＊The EX510 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
| Series | Sonic conductance: C | Cylinder size | Power consumptio (W) |
|---|---|---|---|
| 10-SY3000 | 1.1dm3(s・bar) | φ40 | 0.35 |
| 10-SY5000 | 2.8dm3(s・bar) | φ63 | 0.35 |
| 10-SY7000 | 4.5dm3(s・bar) | φ80 | 0.35 |
| 10-SY9000 | 10dm3(s・bar) | φ100 | 0.35 |
Vertical Suction Filter FHIA
Hydraulic Equipment » Hydraulic Equipment
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・Vertical suction filters are designed for installation between the pump
and reservoir tank.
Their main function is to protect the pump.
・It is possible to detect clogging with the differential pressure indicator
and differential pressure indication switch (CB-□□H).
Safety Instructions Hydraulic Filters/Precautions Guide/INDEX Differential Pressure Indication Switch Green Procurement (RoHS)
| Series | Port size | Rated flow rate L/min | Operating pressure | Element μm (Nominal filtration) |
|---|---|---|---|---|
| FHIA | 1/2B to 4B | 30 to 1300 | Negative pressure | Micromesh : 74, 105, 149 |
Compact Hydraulic Cylinder CHQ/CHDQ
Hydraulic Equipment » Hydraulic Cylinders
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・Lightweight, compact aluminum body
・It is possible to mount auto switches.
・Same longitudinal dimensions for cylinders with/without auto switches
・With auto switch (CHDQ series: CHDQ, CHDQW)
Safety Instructions Hydraulic Cylinders/Precautions Auto Switches/Precautions
Series Variations Technical Data Green Procurement (RoHS)
Series Variations Technical Data Green Procurement (RoHS)
| Series | Nominal pressure (MPa) | Body material | Action | Bore Size (mm) |
|---|---|---|---|---|
| CHQ | 3.5 | Aluminum | Double acting, Single rod | 20, 32, 40, 50 63, 80, 100 |
| CHQW | 3.5 | Aluminum | Double acting, Double rod | 20, 32, 40, 50 63, 80, 100 |
Double-layered Tubing for Instrumentation Device (Single-tube/Double-tube) IN-241, T-X120/121/166
Pneumatic Instrumentation Equipment » Piping Materials
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・Double-layered tubing with an external layer of vinyl chloride or polyolefin to protect the inner tubing
・Inner tubing color: Black or Black + White
| Series | Tube size Tubing O.D. ×Tubing I.D. | Fluid |
|---|---|---|
| IN-241 T-X120/121/166 | φ6×φ4 φ8×φ6 φ10×φ7.5 | Air |
NAMUR Interface 3-Port Solenoid Valve VFN200N
Pneumatic Instrumentation Equipment » Solenoid Valves
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・The interface surface is compliant with NAMUR Standards.
Can be directly installed on industrial valve actuators that comply with NAMUR
| Series | Flow rate characteristics 4/2→5/3（A/B→EA/EB） C | Flow rate characteristics 4/2→5/3（A/B→EA/EB） b | Flow rate characteristics 4/2→5/3（A/B→EA/EB） Cv | Power consumption (W) |
|---|---|---|---|---|
| VFN200N | 5.41 | 0.31 | 1.38 | 1.8 |
Pressure Switch IS
Pneumatic Instrumentation Equipment » Detection Conversion Units
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・The pressure switch IS100 series can be utilized for automatic air pressure control in a wide variety of fields, such as industrial machinery or chemical plants.
・Pressure adjustment range: 0.02 to 0.1 MPa
・Electric wiring: Various wiring and entry methods can be selected.
・Mechanical service life: 100,000 cycles
| Series | Port size | Pressure adjustment range (MPa) | Contact |
|---|---|---|---|
| IS100 | Rc1/4 | 0.02 to 0.1 | Using micro switch A, B 2 contacts |
Electro-Pneumatic Transducer IT600/601
Pneumatic Instrumentation Equipment » Electro-Pneumatic Transducers
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・Air pressure in proportion to the current signal can be output.
・Wide output pressure range: 0.02 to 0.6 MPa
・Fast response
・Independent electric unit/Explosion-proof (flameproof) construction
・Easy span adjustment
| Series | Port size | Supply air pressure (MPa) | Input current |
|---|---|---|---|
| IT600 | Rc1/4 | 0.14 to 0.24 | 4 to 20 mA DC |
| IT601 | Rc1/4 | 0.24 to 0.7 | 4 to 20 mA DC |
Booster Relay IL100/XT240
Pneumatic Instrumentation Equipment » Relays/Valves
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・Used when the piping distance between the instrumentation and operational area is long, or when the operational area has a large capacity
・Can help accelerate actuation speed considerably
| Series | Port size | Pressure ratio | Input/Output pressure |
|---|---|---|---|
| IL100 | Rc1/4, 3/8 | 1：1 | 0.7 MPa |
| XT240 | Rc. NPT 1/4 (SIG), 1 (SUP. OUT) | 1：1 | 0.7 MPa |
Industrial Filter/Vessel Series FGD
Industrial Filters/Sintered Metal Elements » Industrial Filters
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・Ideal for low-flow filtration (Max. 60 L/min)
・It is possible to select the antistatic specification (FGDE, FGDF).
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGD | Rc3/8，1/2，3/4 | 0.7, 1 MPa | MAX. 80 |
For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
High Vacuum Equipment » Slit ValvesEquipment for the Semiconductor Industries » Slit Valve/Transfer
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
