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5 Port Solenoid Valve 10-SV
Clean Series/Low-Particle Generation » Directional Control Valves
Clean Series
＊The EX500 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
| Series | Sonic conductance: C | Cylinder size | Power consumption (W) |
|---|---|---|---|
| 10-SV1000 | 1.1dm3(s・bar) | φ40 | 0.6 |
| 10-SV2000 | 2.8dm3(s・bar) | φ63 | 0.6 |
| 10-SV3000 | 4.5dm3(s・bar) | φ80 | 0.6 |
| 10-SV4000 | 10dm3(s・bar) | φ100 | 0.6 |
Suction Filter with Case FH99
Hydraulic Equipment » Hydraulic Equipment
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・Compact, Lightweight
Cover and case material: Aluminum casting
・Prevents pump cavitation
・Easy element maintenance
・It is possible to detect clogging with the differential pressure indicator
and differential pressure indication switch (CB--□□H).
Safety Instructions Hydraulic Filters/Precautions Guide/INDEX Differential Pressure Indication Switch Green Procurement (RoHS)
| Series | Port size | Rated flow rate L/min | Operating pressure | Element μm (Nominal filtration) |
|---|---|---|---|---|
| FH99 | INLET : 1B to 4B | 20 to 900 | Negative pressure | Micromesh : 74, 105, 149 |
JIS Standard Compact Hydraulic Cylinder CHK□/CHDK□
Hydraulic Equipment » Hydraulic Cylinders
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・Lightweight, compact aluminum body
・It is possible to mount auto switches.
・Same longitudinal dimensions for cylinders with/without auto switches
・Compliant with JIS Standards (CHKD series)
・With auto switch (CHDK□ series: CHDKD, CHDKG)
Safety Instructions Hydraulic Cylinders/Precautions Auto Switches/Precautions
Series Variations Technical Data Green Procurement (RoHS)
Series Variations Technical Data Green Procurement (RoHS)
| Series | Nominal pressure (MPa) | Body material | Action | Bore Size (mm) |
|---|---|---|---|---|
| CHKD | 10 | Aluminum | Double acting, Single rod | 20, 25, 32, 40, 50 63, 80, 100 |
| CHKG | 16 | Aluminum | Double acting, Single rod | 20, 25, 32, 40, 50 63, 80, 100 |
Reinforced Corrugated Cardboard Specification/Longer Length Reel: Nylon Tubing T0604-X64
Pneumatic Instrumentation Equipment » Piping Materials
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・Length per roll: 500/250 m
・For general pneumatic tubing
・Nylon tubing
| Series | Tube size Tubing O.D. ×Tubing I.D. | Fluid |
|---|---|---|
| T0604-X64 | φ6×φ4 | Air/Oil, Water |
NAMUR Interface 5-Port Solenoid Valve VFN2000N
Pneumatic Instrumentation Equipment » Solenoid Valves
-
・The interface surface is compliant with NAMUR Standards.
Can be directly installed on industrial valve actuators that comply with NAMUR
| Series | Flow rate characteristics 4/2→5/3（A/B→EA/EB） C | Flow rate characteristics 4/2→5/3（A/B→EA/EB） b | Flow rate characteristics 4/2→5/3（A/B→EA/EB） Cv | Power consumption (W) |
|---|---|---|---|---|
| VFN2000N | 4.57 | 0.17 | 1.06 | 1.8 |
Lock-Up Valve IL201/211/220
Pneumatic Instrumentation Equipment » Relays/Valves
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・The lock-up valve is used when any air source or air supply piping line failure occurs in the air operated process control line.
Single acting, Double acting: Retains the pressure at the operating area as an emergency operation until the air source recovers to its normal state
3-port: Changes the supply port if a problem occurs
| Series | Port size | Set pressure (MPa) | Shut-off pneumatic circuit pressure |
|---|---|---|---|
| IL201/211/220 | Rc1/4 | 0.14 to 0.7 | Max. 0.7 MPa |
Smart Positioner/External Input Signal (Remote) Type
IP8101-X419-□
Pneumatic Instrumentation Equipment » Positioners
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・Allows for the remote control of cylinders
Controls the cylinder by feedback signal
| Description | Series | Type | Port size (Rc, NPT, G) | Supply air pressure (MPa) | Input current |
|---|---|---|---|---|---|
| Smart positioner | IP8101-X419-□ | External input signal (remote) type | 1/4 | 0.3 to 0.7 | 4 to 20 mA DC |
Industrial Filter/Vessel Series FGE
Industrial Filters/Sintered Metal Elements » Industrial Filters
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・Ideal for medium flow rate filtration (Max. 230 L/min)
・Easy element replacement for the V-band type
(With cover anti-scattering mechanism)
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGE | R1, 2 | 0.7 MPa | MAX. 80 |
Slit Valve XGT
High Vacuum Equipment » Slit ValvesEquipment for the Semiconductor Industries » Slit Valve/Transfer
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・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
High Vacuum Equipment » High Vacuum ValvesEquipment for the Semiconductor Industries » Exhaust Line
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・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles
・Space required for equipment can be reduced
Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation
・Lightweight, Compact
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-100/160-X152 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 100，160 |
| XLC-100/160-1-X152 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 100，160 |
