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Vacuum Regulator 10-IRV

Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment

    Clean Series


    ・Allows adjustment of vacuum line pressure.
    ・Single sided connections series
    ・Weight reduced by 20% (Compared with the existing IRV2000 with IRV20 fitting)
    ・Built-in One-touch fittings
    ・Easy to attach/detach the pressure gauge or digital pressure switch due to attachment by clip.
    ・Mounting direction of the pressure gauge or digital pressure switch can be changed. (Standard connections only)
    ・Mounting angle of the pressure gauge or digital pressure switch can be changed easily (in 60 degree increments).
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions　Green Procurement (RoHS)
SeriesPort sizeSet pressure (kPa)
10-IRVφ6, φ8, φ1/4, φ5/16-100 to -1.3
10-IRV20φ6, φ8, φ10, φ1/4, φ5/16, φ3/8-100 to -1.3

Low Speed Cylinder 10-/11-CM2X-Z/CQSX/CQ2X/CUX

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
TypeSeriesActionBore size
(mm)		Min piston speed
(mm/s)
Air cylinder10-CM2X-ZDouble acting20, 25, 32, 401
Air cylinder11-CM2X-ZDouble acting20, 25, 32, 400.5
Compact cylinder10-CQSXDouble acting20, 25, 32, 401
Compact cylinder11-CQSXDouble acting12, 161
Compact cylinder11-CQSXDouble acting20, 250.5
Compact cylinder10-CQ2XDouble acting32, 40, 50, 631
Compact cylinder11-CQ2XDouble acting32, 40, 50, 630.5

In-line Push Locking Type AS

Flow Control Equipment » Speed Controllers for General Purposes
    ・One-touch needle locking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Flow Control Equipment/Precautions　Series Variation
Green Procurement (RoHS)
TypeSeriesPort size on
the cylinder side
In-line push locking typeAS35001/4，3/8

High Pressure: Made to Order AR20 to 60-B-X425

Modular F.R.L./Pressure Control Equipment » Modular F.R.L.
Modular F.R.L. Units » Regulators
    Stronger materials are used for the manufacturing of regulators intended for high-pressure operation.
    The modified construction also allows for a wider set pressure range.

    Refer to the AR series made to order specifications in the AC series catalog for details.
    ▶Click here for details
Product Selection Guide　Green Procurement (RoHS)
SeriesProof pressure [MPa]Max. operationg pressure [MPa]Set pressure range [MPa]Ambient and fluid temperatures [℃]
AR20 to 60-B-X4253.02.00.1 to 1.7-5 to 60 (No freezing)

Power Clamp Cylinder CKZ2N

Air Cylinders » Clamp Cylinders
    ・Complies with the new NAAMS Standards
    　(North America Automotive Metric Standard)
    ・138 types of arm variations
    ・Spatter resistant and water resistant structure
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Actuators/Precautions　Features/Variations
Green Procurement (RoHS)
SeriesArm opening angleSwitchBore size (mm)
CKZ2N30º, 45º, 60º, 75º, 90º
105º, 120º, 135º		TURCK/P＆F50, 63, 80

Compact Cylinder/Guide Rod Type CQM/CDQM

Air Cylinders » Compact Air Cylinders
    ・Built-in guide rod in the CQS and CQ2 series compact cylinders
    ・Non-rotating accuracy: ±0.2° or less
    ・2 to 4 times the lateral load resistance
    　∗ Compared to the CQ series compact cylinder
    ・Loads can be directly mounted.
    ・Mounting dimensions are compatible with the CQS and CQ2 series.
    ・With auto switch (CDQM series: CDQM)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Actuators/Precautions
Auto Switches/Precautions　Model Selection/Technical Data　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
StandardCQMDouble acting12，16，20，25，32，40
50，63，80，100

5-Port Solenoid Valve VQC4000/5000

Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
Features
    ・Compact with a large flow capacity
    　VQC4000: Can drive cylinders up to ø160
    　VQC5000: Can drive cylinders up to ø180
    ・An extensive range of protocols are available.
    ・Power saving: Power consumption of 0.4 W (Low wattage type)
    ・Enclosure IP67 compliant
    ・Supports Interface regulators

    ＊The EX250/500 series is to be discontinued. When designing new
    　equipment and facilities, consider using another series (EX260/EX600)
    　instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 5-Port Solenoid Valve VQC4000/5000
    Manual
    Series View search result
    VQC4000View search result
    VQC5000
  • 5-Port Solenoid Valve VQC4000/5000
    DoC/IM
    Series View search result
    VQC4000View search result
    VQC5000View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→5/3（A/B→EA/EB）
C［dm3/（s・bar）］		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
b		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
Cv		Applicable
cylinder size		Power
consumption
(W)
VQC40007.30.382.0φ1601.0
0.4(Low wattage type)
VQC5000170.314.7φ1801.0
0.4(Low wattage type)

Clean Regulator SRH

Modular F.R.L./Pressure Control Equipment » Regulators
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Pressure Control Equipment » Regulators
Equipment for the Semiconductor Industries » Cooling Water Line
    ・Contamination-controlled stainless steel regulator
    ・Oil-free
    ・2 types of diaphragm materials: PTFE, Fluororubber
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Product Selection Guide　Green Procurement (RoHS)
SeriesRelief mechanismPort sizeSet pressure (MPa)
SRHNon-reliefRc1/8，1/4，3/8，1/2
9/16-18UNF，7/8-14UNF		Low pressure type：0.02 to 0.2
High pressure type：0.05 to 0.7
SRHReliefRc1/8，1/4，3/8，1/2Low pressure type：0.02 to 0.2
High pressure type：0.05 to 0.7

Compact Cylinder/Plate Type CQU

Air Cylinders » Compact Air Cylinders
    ・The oval piston design reduces the width by a maximum of 40%.
    　(Compared with the CQ2 series)
    ・Weight: Reduced by up to 36% (Compared with the MU series)
    ・A small type auto switch can be mounted from 4 directions.
    ・No protrusion of the auto switch from the mounting slot
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Actuators/Precautions
Auto Switches/Precautions　Model Selection/Technical Data　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
StandardCQUDouble acting, Single rod20，25，32，40

5-Port Solenoid Valve VQZ1000/2000/3000

Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
Features
    ・The combined mounting of a 3-port valve and a 5-port valve on a manifold valve is possible.
    ・Can be mounted on an aluminum body manifold or a DIN rail
    ・Manifold type no.: VV5QZ12, VV5QZ15, VV5QZ22, VV5QZ25, VV5QZ32, VV5QZ35

    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→5/3（A/B→EA/EB）
C［dm3/（s・bar）］		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
b		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
Cv		Applicable
cylinder size		Power
consumption
(W)
VQZ10001.30.240.32φ630.35(Standard)
0.9
(High pressure type, High speed response type)
VQZ20002.30.290.53φ800.35(Standard)
0.9
(High pressure type, High speed response type)
VQZ30004.60.261.2φ1000.35(Standard)
0.9
(High pressure type, High speed response type)

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