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Slit Valve XGT
High Vacuum Equipment » Slit Valves
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・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
High Vacuum Equipment » High Vacuum Valves
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・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles
・Space required for equipment can be reduced
Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation
・Lightweight, Compact
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-100/160-X152 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 100，160 |
| XLC-100/160-1-X152 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 100，160 |
Thermo-chiller Compact Dual/Basic Type for Lasers HRLE
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
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・The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
・Space saving, Reduced wiring
Footprint reduced by 21%
One power supply system for 2 channels
・Energy saving
Power consumption reduced by 17%
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity (CH1, 2 total) | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRLE050-A | CH1:15 to 25℃ CH2:CH1 temperature ＋ 0 to 15℃ | 4.8kW/5.8k (50Hz/60Hz) | CH1:±0.1 CH2:±0.5 | Air-cooled refrigeration | Tap water, Deionized (pure) water |
| HRLE050-W | CH1:15 to 25℃ CH2:CH1 temperature ＋ 0 to 15℃ | 4.8kW/5.8k (50Hz/60Hz) | CH1:±0.1 CH2:±0.5 | Water-cooled refrigeration | Tap water, Deionized (pure) water |
| HRLE090-A | CH1:15 to 25℃ CH2:CH1 temperature ＋ 0 to 15℃ | 8.0 kW/9.5 kW (50 Hz/60 Hz) | CH1: ±0.1 CH2: ±0.5 | Air-cooled refrigeration | Tap water, Deionized (pure) water |
| HRLE090-W | CH1: 9 kw,19 kW, 26 kW CH2: 1.0 kW (Max. 1.5 kW) | 9.5 kW/11.0 kW (50 Hz/60 Hz) | CH1: ±0.1 CH2: ±0.5 | Water-cooled refrigeration | Tap water, Deionized (pure) water |
Thermo-chiller/Inverter Type HRSH
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
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・Complete with energy-saving triple inverter!
・Outdoor installation, Splashproof type (IPX4)
・Max. ambient temperature: 45℃
・Min. ambient temperature: –20℃ (For the air-cooled type)
・Temperature stability: ±0.1℃ (When a load is stable)
・Space saving and lightweight: 280 kg (25 kW type)
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH | 5 to 35℃ | 10 kW 15 kW 20 kW 25 kW 28 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Non-Metallic Pump/Double Acting Pump PAF
Process Pumps(Diaphragm Pumps) » Process PumpsFluoropolymer Equipment/PVC Equipment » Fluoropolymer Process Pumps
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＊Tightening bolt, Air switching valve: Stainless steel
Use the PAF series standard products when a metal-free pump is necessary for hydrofluoric acid, etc.
Safety Instructions Series Variations Related Products Applicable Fluids Product Specific Precautions Green Procurement (RoHS)
| Series | Actuation | Discharge rate (L/min) | Wetted parts material |
|---|---|---|---|
| PAF3410 | Automatically operated type | 1 to 20 | New PFA (Fluororesin) |
| PAF3413 | Air operated type | 1 to 15 | New PFA (Fluororesin) |
| PAF3410-X68 | Automatically operated type | 1 to 20 | New PFA (Fluororesin) |
| PAF5410 | Automatically operated type | 5 to 45 | New PFA (Fluororesin) |
| PAF5413 | Air operated type | 5 to 38 | New PFA (Fluororesin) |
Process Pump PA5000
Process Pumps(Diaphragm Pumps) » Process Pumps
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・Now with compact / energy saving / high-dispense-volume body material
polypropylene (PP)!
・Compact: Height 185 mm x Width 134 mm x Depth 202 mm
・Lightweight: 3.0 kg (Polypropylene)
・Fluid contact body material:
Selectable from PP (polypropylene), aluminum or stainless steel
・Automatically operated type and air operated type are available.
・Self-priming makes priming unnecessary
| Series | Actuation | Discharge rate (L/min) | Wetted parts material |
|---|---|---|---|
| PA50□□ | Automatically operated Air operated | 63 | Polypropylene (PP) |
| PA51□□ | Automatically operated Air operated | 60 | Aluminum (ADC12) |
| PA52□□ | Automatically operated Air operated | 60 | Stainless steel (SCS14) |
SUS316L Stainless Steel Fitting VCK
Process Valves » Valves for Water and Chemical Base Fluids
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・Since sealing tape is not required, there is no need to worry about insulation.
(Applicable for painting with high voltage)
・Easy insertion/removal of piping in narrow spaces
| Series | Material/Description | Port size |
|---|---|---|
| VCK | Stainless steel fitting (316L SS) | G1/4 |
High Pressure Coolant Valve SGH
Process Valves » Coolant Valves
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・Max. operating pressure: 3 MPa, 7 MPa, 10 MPa [New], 14 MPa [New]
・Applicable to high-speed grinding and long drilling processes
・Coolant valve for high-pressure coolant liquid that is ideal for lubrication, dust blowing, and cooling
・Service life: 3 million cycles (Based on SMC's test conditions)
・Water hammer: Reduced by 20% (Compared to existing model, VNH series)
・Power consumption: 0.35 W (24 VDC, V116)
・The 3-port dual pressure type has been standardized.
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| SGH | N.C./N.O. | 3/8 to 1 | 7.5 to 15.9 |
3-Color Display Digital Flow Switch PF2MC7□（-L）
Switches/Sensors/Controller » Electronic Flow Switches/SensorsIO-Link Devices » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
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・Dry air, N2
・3-color/3-screen display
・A wide range of flow measurement is possible with 1 product.
Flow ratio 100:1, Smallest settable increment: 1 L/min
・Grease-free
・IO-Link compatible
▶IO-Link Master
Safety Instructions Pressure Switches/Flow Switches/Precautions Flow Switch Series Variations
Green Procurement (RoHS) IO-Link Master
Green Procurement (RoHS) IO-Link Master
| Series | Rated flow range (L/min) |
|---|---|
| PF2MC | 5 to 500 10 to 1000 20 to 2000 |
2-Color Display Digital Flow Switch PFM
Switches/Sensors/Controller » Electronic Flow Switches/Sensors
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・Dry air, N2, Ar, CO2
・Grease-free
・Integrated flow adjustment valve
・Compact, lightweight, Space saving
Safety Instructions Pressure Switches/Flow Switches/Precautions Flow Switch Series Variations
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Rated flow range (L/min) |
|---|---|
| PFM | 0.2 to 10 (0.2 to 5) 0.5 to 25 (0.5 to 12.5) 1 to 50 (1 to 25) 2 to 100 (2 to 50) ( ): For CO2 |
