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High Vacuum Valves
Normal Close High Vacuum Solenoid Valve XSA
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・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
・2 types of fittings and female threads are available.
・Power consumption: Max. 25% reduction
・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Series | Valve type | Fluid | Piping | Port size |
---|---|---|---|---|
XSA | Normally closed | Air Inert gas | Face seal fitting Compression fitting | 1/4, 3/8 |
XSA | Normally closed | Air Inert gas | Rc, NPT female thread | 1/8, 1/4, 3/8 |
Features
■Minimum operating pressure:1×10-6Pa(abs)
■Leakage:Internal 1.3×10-9Pa・m3/s, External 1.3×10-11Pa・m3/s
■2 types of fitting and female threads available
Face seal fitting
A fitting with high leak integrity from vacuum to positive pressure, that forms a seal through the placement of a metal gasket at the end of the sleeve and the tightening of the nut.
Compression fitting
A self-aligning tube fitting that uses ferrule
rings to compress the tubing, affecting the
seal when the nut is tightened.
Female thread(Rc, NPT) [New]
■Fluid temperature:5 to 60℃
■Reverse pressure potential:0.5 MPa(G)※
※ XSA1-12