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Clean Gas Filter SF

Air Preparation Equipment » Air Preparation Filters
Clean Series/Low-Particle Generation » Clean Gas Filters/Air Filters
    ・Cartridge type allows for element replacement
      (SFA100/200/300, SFB100)
    ・Compact, disposable type for the semiconductor industry
     (SFB300, SFC100)
TypeSeriesOperating pressureFiltration (μm)
Cartridge type discSFA100/200/300Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)
Cartridge type straightSFB100Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)
Cartridge type straightSFB200Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
120
Disposable type straightSFB300Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)
Disposable type multiple discSFC100Max. 0.99 MPa
(Vacuum: 1.3×10-6 kPa)
0.01
(Filtration efficiency: 99.99%)

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