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Directional Control Valves
1. Pilot Operated 4/5 Port Solenoid Valves
2. Pilot Operated 3 Port Solenoid Valves
3. Direct Operated 3/4/5 Port Solenoid Valves
4. Reduced-wiring Fieldbus System (Serial Transmission System)
5. Air Operated Valves
6. Mechanical Valves/Hand Valves
7. Power Valves
8. ISO Valves
9. Explosion-Proof Valves
Air Cylinders
1. Standard Air Cylinders (Round Type）
2. Standard Air Cylinders (Square Cover）
3. Compact Air Cylinders
4. Environment Resistant Cylinders
5. Floating Joints/Rod End
6. Air-hydro Units
7. Mechanically Jointed Rodless Cylinders
8. Magnetically Coupled Rodless Cylinders
9. Table Cylinders
10. Guide Cylinders (MG Series)
11. Guide Cylinders (CX Series)
12. Fine Lock Cylinders
13. Lock Cylinders/Cylinder with An End Lock
14. Specialty Cylinders
15. Clamp Cylinders
16. Pin Shift Cylinder
17. Stopper Cylinders
18. Stroke Reading Cylinders
19. Valve Mounted Air Cylinders
20. ISO Cylinders
21. Shock Absorbers
22. Auto Switches
23. Cylinder Speed Checkers
Rotary Actuators/Air Grippers
1. Rotary Actuators Vane Type
2. Rotary Actuators Rack & Pinion Type
3. Parallel Type Air Grippers
4. Angular Type Air Grippers
5. Auto Switches
Electric Actuators/Cylinders
1. Card Motor
2. Slider Type
3. Rod Type/Guide Rod Type
4. Slide Tables
5. Miniature
6. Rotary Tables
7. Grippers
8. Controllers/Drivers
9. Environment
10. Motorless Type
11. Made to Order
12. Electric Cylinders
13. Moving Coil Actuators
Vacuum Equipment
1. Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
2. Vacuum Ejectors
3. Vacuum Release Valve Units
4. Air Suction Filters
5. Vacuum Pads (Vacuum Suction Cups)
6. Special Pads
7. Vacuum Saving Valves
8. Vacuum Flow
9. Vacuum Regulators
10. Related Equipment for Vacuum Systems
Air Preparation Equipment
1. Aftercoolers/Air Tanks
2. Air Dryers
3. Air Preparation Filters
4. Auto Drains/Differential Pressure Gauges
Modular F.R.L. ⁄ Pressure Control Equipment
1. Modular F.R.L.
2. Regulators
3. Electro-Pneumatic Regulators
4. Proportional Valves
5. Booster Regulators
Lubrication Equipment
1. Lubrication Equipment
Fittings and Tubing
1. Fittings for General Purposes
2. Fittings for General Purposes(S Couplers/Multi-connectors)
3. Fittings for Special Environments
4. Fittings for Special Environments(Clean/Fluoropolymer)
5. Tubing
6. Tubing(Tubing for Special Environments)
7. Tubing(Fluoropolymer/Clean)
8. Related Products
Flow Control Equipment
Speed Controllers
1. Speed Controllers for General Purposes
2. Speed Controllers for Low Speed Control
3. Speed Controllers Special Environments
4. Speed Controllers with Special Functions
5. Tool Operation Type Speed Controllers
6. Air Saving Speed Controllers Air Saving Valves
7. Related Equipment
Silencers ⁄ Exhaust Cleaners ⁄ Blow Guns ⁄ Pressure Gauges
1. Silencers
2. Exhaust Cleaners
3. Blow Guns
4. Pressure Gauges
Switches ⁄ Sensors ⁄ Controller
1. Electronic Pressure Switches/Sensors (Self-contained Type)
2. Electronic Pressure Switches/Sensors (Remote Type)
3. Mechanical Pressure Switches
4. Electronic Flow Switches/Sensors
5. Mechanical Flow Switches
6. Controllers
Static Neutralization Equipment
1. Static Neutralization Equipment/Ionizers
Process Valves
1. 2/3 Port Solenoid Valves/Air Operated Valves
2. Compact 2/3 Port Solenoid Valves
3. 5.0 MPa 2/3 Port Solenoid Valves
4. 2/3 Port Valves for General Purpose Fluid Control
5. Coolant Valves
6. Valves for Water and Chemical Base Fluids
Chemical Liquid Valves ⁄ Fittings & Needle Valves ⁄ Tubing
1. Chemical Liquid Valves
2. Fittings/Needle Valves
3. Tubing
Process Pumps(Diaphragm Pumps)
1. Process Pumps
Temperature Control Equipment
1. Thermo-Chillers (Circulating Fluid Temperature Controllers)
2. Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
3. Air Temperature Controllers
Process Gas Equipment
1. Process Gas Equipment
High Vacuum Equipment
1. High Vacuum Valves
2. Slit Valves
3. Rodless Cylinders for Vacuum
Industrial Filters ⁄ Sintered Metal Elements
1. Industrial Filters
2. Sintered Metal Elements
Pneumatic Instrumentation Equipment
1. Positioners
2. Regulators
3. Relays/Valves
4. Electro-Pneumatic Transducers
5. Actuators
6. Detection Conversion Units
7. Solenoid Valves
8. Piping Materials
Hydraulic Equipment
1. Hydraulic Cylinders
2. Hydraulic Equipment

Subject ⁄ Industry Classified Products

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Process Gas Equipment

Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

	・For UHP gas delivery in semiconductor and other clean industries ・Body material: 316L SS secondary remelt or 316L SS ・Electropolished wetted parts ・External metal seal construction

Data Download CAD PDF(8.4MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Actuation	Application	Body material	Connection type	Connection size
AP/SL	Single stage	Distribution (Compact)	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8''
AP/SL	Single stage	Distribution	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''
AP/SL	Single stage	Bulk gas	316L SS	Face seal Tube weld	1/2'', 3/4'', 1''
AP/SL	Single stage	Source	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''
AP/SL	Single stage	Sub-atmospheric pressure	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''
AP	Two stage	Source	316L SS secondary remelt	Face seal Tube weld	1/4''，3/8''
AZ	Single stage	Distribution	316L SS	Face seal Tube weld	1/4'', 3/8'' 1/2''
AZ	Single stage	Source	316L SS	Face seal Tube weld	1/4'', 3/8'' 1/2''
AZ	Single stage	Sub-atmospheric pressure	316L SS	Face seal Tube weld	1/4'', 3/8'' 1/2''

Regulators for Ultra High Purity (UHP)AP/SL/AP/AZ

Series	Download
AP/SL
AP/SL
AP/SL
AP/SL
AP/SL
AP
AZ
AZ
AZ

Regulator/Back Pressure Regulator for General Applications AK/BP

	・For a wide variety of applications from semiconductor to general ・Body material of 316 SS or brass is available depending on the gas.

Data Download CAD PDF(8.4MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Actuation	Application	Body material	Connection type	Connection size
AK	Single stage	Distribution	316 SS or Brass	NPT female, Compression	1/4'', 3/8'' 1/2''
AK	Single stage	Source	316 SS or Brass	NPT female, Compression	1/4'', 3/8'' 1/2''
AK	Single stage	Sub-atmospheric pressure	316 SS or Brass	NPT female, Compression	1/4'', 3/8'' 1/2''
AK	Two stage	Source	316 SS or Brass	NPT female, Compression	1/4''
BP	Back pressure regulator	―	316 SS or Brass	NPT female, Compression	1/4''

Regulator/Back Pressure Regulator for General ApplicationsAK/BP

Series	Download
AK
AK
AK
AK
BP

Diaphragm Valve for Ultra High Purity AP

	・For UHP gas delivery in semiconductor and other clean industries ・Used as a gas shutoff valve ・No spring is used for the wetted parts and the drive part is also separated 　from the diaphragm. Dead space in the flow path is small in order to suppress 　particle generation.

Data Download PDF(3MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Type	Body material	Connection type	Connection size
AP	Air operated	316L SS secondary remelt	Face seal Tube weld	1/4''，3/8'' 1/2''，3/4''
AP	Manual	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''

Diaphragm Valve for Ultra High PurityAP

Series	Type	Download
AP	Air operated
AP	Manual

Diaphragm Valve for Ultra High Purity AZ

	・Cleaned for high-purity semiconductor applications and clean room assembled ・Helium leak tested ・SEMI Standards-compliant ・User-friendly forged body

Data Download CAD PDF(4.2MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Type	Body material	Connection type	Connection size
AZ	Air operated	316L SS	Face seal Tube weld	1/4'' 3/8'' 1/2
AZ	Manual	316L SS	Face seal Tube weld	1/4'' 3/8'' 1/2

Diaphragm Valve for Ultra High PurityAZ

Series	Type	Download
AZ	Air operated
AZ	Manual

Check Valve/Vacuum Generator/Flow Switch AP

[Check valve]
・Fluid backflow is prevented by back pressure.
・Unique design with only one moving part in the gas stream, an O-ring
・Springless structure suppresses particle generation by vibration or
　chattering and pressure fluctuations on the downstream side

[Vacuum generator]
・Vacuum generation equipment
・Applicable to the exhaustion of unnecessary gas remaining inside the
　piping during gas cylinder replacement

[Flow switch]
・Detects excess flow above a given flow rate caused by pipe breakage, etc.

Data Download PDF(1.2MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Type	Body material	Connection type	Connection size
AP	Check valve	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8''
AP	Vacuum generator	316L SS	Face seal Tube weld	1/4'', 3/8''
AP	Flow switch	316L SS secondary remelt 316L SS	Face seal Tube weld	1/2'', 3/4''

Check Valve/Vacuum Generator/Flow SwitchAP

Series	Type	Download
AP	Check valve
AP	Vacuum generator
AP	Flow switch

Diaphragm Valve for General Applications AK

・Rc, R, and NPT connections have been added to the series.
・For a wide variety of applications from semiconductor to general
・Cleaned for O₂ service
・Compact and lightweight due to the shortening of the actuator (AK3542/4542)
・M5 actuation port (AK3542/4542)
・Compact and lightweight due to the modifying of the knob design (AK3652/4652)
・The knob features a unique design that combines a scalloped round knob with a raised
　rectangular section to provide two choices of gripping. (AK3652/4652)

Data Download CAD PDF(1.6MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Type	Body material	Connection type	Connection size
AK	Air operated	316 SS	Compression Rc, R, NPT	1/4''，3/8''
AK	Manual	316 SS	Compression Rc, R, NPT	1/4''，3/8''

Diaphragm Valve for General ApplicationsAK

Series	Type	Download
AK	Air operated
AK	Manual

Regulator for General Applications AK1000T

	・For a wide variety of applications from semiconductor to general ・Compact and lightweight 　Weight: 0.52 kg, Height: 97.5 mm ・Minimum dead leg construction ・Multiple port types are available. 　Select from compression, NPT female, or Rc thread.

Data Download PDF(1.9MB)

Other Data	Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations Valve and Regulator Recommendations　Technical Data/Glossary of Terms Green Procurement (RoHS)

Series	Type	Body material	Connection type	Connection size
AK1000T	Manually operated type	316 SS	Compression Rc, NPT	1/4", 3/8"

Regulator for General ApplicationsAK1000T

Series	Type	Download
AK1000T	Manually operated type

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