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IN_PROD_346
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» Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
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・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
・Energy saving
The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
Power consumption: Max. 65% reduction
Facility water: Max. 67% reduction
・High performance
Temperature stability: ±0.1°C (When a load is stable)
Cooling time: Max. 46% reduction (SMC comparison)
・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ-F | -20 to 40℃ 10 to 60℃ -20 to 90℃ | 2 kW, 4 kW, 8 kW, 10 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids Ethylene glycol aqueous solution Tap water/Deionized water |
Water-cooled Thermo-chiller/High-performance Type HRW
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Thermo-chiller/High-performance Type HRZ
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.
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・Suitable for semiconductor processing equipment with a wide variety of
features, such as high-temperature stability, a wide temperature range,
failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water |
