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Water-cooled Thermo-chiller/High-performance Type HRW
・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
|HRW||20 to 90℃||2 kW, 8 kW, 15 kW, 30 kW||±0.3℃||
Fluorinated liquid, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)
Water-cooled Thermo-chiller/High-performance TypeHRW