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Product Part Number: You will need to login to use the PDF datasheet. PDF datasheet |
Specifications: XGT Series Slit Valve
| Field | Value | Value Details |
|---|---|---|
| Valve Size | 22 | Number of Axis:Two Axes Bellows;Applicable Wafer Size:200 mm |
| Valve Type | 1 | Non-cassette Type |
| Opening Window Size | 46236 | Height X Width:46X236 mm;Applicable Wafer Size:200 mm |
| Gate O-ring Material | 1 | FKM |
| Auto Switch And The Connector | A | Auto Switch:D-A93(With 2 pcs. For Opening And Closing);Connector:Lead Wire:0.5 m (Without Connector) |
Related Products
| Image | Part Number | Part Name |
|---|---|---|
| － | XGT200-4-9S | Wiper |
| － | XGT200-2-5S | Holding bolt |
| － | XGT0402-2-1S | Gate |
| － | XGT200-9-7S | O-ring |
| － | XGT200-9-7-F1S | O-ring |
| － | XGT200-9-9S | O-ring |
