●For UHP gas delivery in semiconductor and other clean industries
●Body material: 316L SS secondary remelt or 316L SS
●Electropolished wetted parts
●Metal seal to atmosphere

Field	Value	Value Details
Delivery Pressure	02	1 To 30 psig / 0.007 To 0.2 MPa
Material	SHP	Body:316 SS,Poppet:316 SS,Diaphragm:316 SS,Nozzle:316 SS
Surface Finish	-	15 μin./ 0.4 μm Standard
Number of Ports	3PW	3 Ports
Connections (Inlet①)	FV4	1/4 Inch Face Seal Female
Connections (Outlet②)	FV4	1/4 Inch Face Seal Female
Gauge Port (Inlet③)	-	No Gauge Port
Gauge Port (Outlete④)	V3	Pressure Gauge:-30 In.Hg To 30 psig / -0.1 To 0.2 MPa(Please Use It Within The Measuring Range Of The Pressure Gauge, Otherwise The Pressure Gauge May Be Damaged)
Pressure Gauge Unit	MPA	MPa
Seat Material	-	PCTFE Standard
Option	-	Standard
Bonnet Option	-	Standard