●For UHP gas delivery in semiconductor and other clean industries
●Body material: 316L SS secondary remelt or 316L SS
●Electropolished wetted parts
●Metal seal to atmosphere

Field	Value	Value Details
Delivery Pressure	15	5 To 150 psig / 0.034 To 1.0 MPa
Material	S	Body:316 SS,Poppet:316 SS,Diaphragm:316 SS
Surface Finish	-	10 μin./ 0.25 μm Standard
Ports	3PW	3 Ports
Connections (Inlet①)	MV6	3/8 Inch Face Seal Male
Connections (Outlet②)	MV6	3/8 Inch Face Seal Male
Gauge Port (Inlet③)	-	No Gauge Port
Gauge Port (Outlete④)	H	Pressure Gauge:-30 In.Hg To 160 psig / -0.1 To 1.1MPa(Please Use It Within The Measuring Range Of The Pressure Gauge, Otherwise The Pressure Gauge May Be Damaged)
Pressure Gauge Unit	MPA	MPa
Seat Material	-	PCTFE Standard
Option	-	Standard
Bonnet Option	-	Standard