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Thermo-chiller/High-performance Type HRZ
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Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Temperature Adjustment Line » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.
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・Suitable for semiconductor processing equipment with a wide variety of
features, such as high-temperature stability, a wide temperature range,
failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water |
Non F-Gas (CO2 Refrigerant) Refrigerated Thermo-chiller HRZC
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Temperature Control Equipment » Chiller Compliant Regulations
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Chiller Compliant Regulations
Temperature Adjustment Line » Chiller Compliant Regulations
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・Non F-Gas
・Uses CO2 Refrigerant (R744)
・Greatly reduced GWP
・GWP = 1 Compliant with each country’s refrigerant regulations
EU refrigerant regulations: GWP150 or more
US refrigerant regulations: GWP700 or more
California, US refrigerant regulations: GWP750 or more
∗ “GWP” indicates the global warming potential. The values are based on
the IPCC AR4.
・Air transport possible
・Eliminates the need to pay for F-Gas recovery & disposal
・Eliminates the need for periodic inspections based on the Fluorocarbon
Emissions Control Act (Japan)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZC | −20 to 90℃ | 2kW, 4kW, 8kW, 10 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids 60% ethylene glycol aqueous solution Deionized water/Tap water |
[Low GWP Refrigerant Chiller] Refrigerated Thermo-chiller HRZF
Temperature Control Equipment » Chiller Compliant RegulationsEquipment for the Semiconductor Industries (Temperature Adjustment Line) » Chiller Compliant Regulations
Temperature Adjustment Line » Chiller Compliant Regulations
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· Low GWP refrigerant chiller
GWP:146∗ ∗ Regulation (EU) 2024/573, AIM Act 40 CFR Part 84
EU refrigerant regulations: GWP150 or more
US refrigerant regulations: GWP700 or more
California, US refrigerant regulations: GWP750 or more
· Environmentally friendly R454C as refrigerant (Not available for air
transport)
· More effective energy-saving is achieved through use of a DC inverter
compressor and an inverter pump.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZF010 | -20〜90℃ | 10kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids, 60% ethylene glycol aqueous solution |
