Solutions » Introduction to Industry-Specific Solutions » Equipment for Physical and Chemical Industry » Cleaning ⁄ Sterilization » Filters
Filters
Clean Gas Filter SF
Air Preparation Equipment » Air Preparation FiltersClean Series/Low-Particle Generation » Clean Gas Filters/Air Filters
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・Cartridge type allows for element replacement
(SFA100/200/300, SFB100)
・Compact, disposable type for the semiconductor industry
(SFB300, SFC100)
Safety Instructions Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
| Type | Series | Operating pressure | Filtration (μm) |
|---|---|---|---|
| Cartridge type disc | SFA100/200/300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB200 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 120 |
| Disposable type straight | SFB300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
| Disposable type multiple disc | SFC100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
Clean Air Filter/Hollow Fiber Element SFD
Air Preparation Equipment » Air Preparation FiltersClean Series/Low-Particle Generation » Compressed Air Cleaning Filter Series
Clean Series/Low-Particle Generation » Clean Gas Filters/Air Filters
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・Built-in hollow fiber element
・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate)
・Compliant with the RoHS Directives regulations regarding the reduction
of environmentally detrimental chemicals
・Metal Case Type (Made to Order)
Stainless steel, Aluminum cases
Safety Instructions Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
| Series | Type | Flow rate L/min (ANR) (At inlet pressure 0.7 MPa) | Operating pressure | Filtration (μm) |
|---|---|---|---|---|
| SFD100 | Disposable type (Non-replaceable element) | to 100 | Max.1.0MPa | 0.01 (Filtration efficiency: 99.99%) |
| SFD110 | Disposable type (Non-replaceable element) | to 120 | Max.1.0MPa | 0.01 (Filtration efficiency: 99.99%) |
| SFD200 | Cartridge type (Replaceable element) | to 500 | Max.1.0MPa | 0.01 (Filtration efficiency: 99.99%) |
