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工艺气体元件

单向阀/真空发生器/流量开关 AP

    [单向阀]
    ・防止背压使流体逆流。
    ・构造简单,内部的可动零部件仅为O形圈。
    ・采用无弹簧的构造,可减少因震颤等产生的颗粒,降低下游的压力变动。
    [真空发生器]
    ・真空发生器。
    ・用于更换气罐时,排出配管中残余的气体。
    [流量开关]
    ・检测配管破裂等造成的过剩流量。
系列形式主体材质配管连接配管尺寸
AP单向阀SUS316L二次熔炼面密封接头
管子焊接
1/4'',3/8''
AP真空发生器SUS316L面密封接头
管子焊接
1/4'',3/8''
AP流量开关SUS316L二次熔炼
SUS316L
面密封接头
管子焊接
1/2'',3/4''

产品特点

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.

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