Product Information »
WEB Catalog
» Process Gas Equipment
» Process Gas Equipment
Process Gas Equipment
Regulator/Back Pressure Regulator for General Applications AK/BP
-
・For a wide variety of applications from semiconductor to general
・Body material of 316 SS or brass is available depending on the gas.
Safety Instructions Process Gas Equipment/Common Precautions Series Variations
Valve and Regulator Recommendations Technical Data/Glossary of Terms
Green Procurement (RoHS)
Valve and Regulator Recommendations Technical Data/Glossary of Terms
Green Procurement (RoHS)
Series | Type | Application | Body material | Connection type | Connection size |
---|---|---|---|---|---|
AK | Single stage | Distribution | 316 SS or Brass | NPT female, Compression | 1/4'', 3/8'' 1/2'' |
AK | Single stage | Source | 316 SS or Brass | NPT female, Compression | 1/4'', 3/8'' 1/2'' |
AK | Single stage | Sub-atmospheric pressure | 316 SS or Brass | NPT female, Compression | 1/4'', 3/8'' 1/2'' |
AK | Two stage | Source | 316 SS or Brass | NPT female, Compression | 1/4'' |
BP | Back pressure regulator | ― | 316 SS or Brass | NPT female, Compression | 1/4'' |
Features
■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.