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Technical Information/Glossary of Terms
|Process Gas Equipment-Glossary of Terms 1
[Term]Ultra High Purity (UHP)
A term common to the semiconductor industry and other clean industries such as solar, LED and flat panel display, used to describe extremely high purity and very low contamination requirements. Gases are of the highest level of purity attainable and gas handling systems and components are designed to maintain such purity without contributing contamination to the gas stream.