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Process Gas Equipment

Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

    ・For UHP gas delivery in semiconductor and other clean industries
    ・Body material: 316L SS secondary remelt or 316L SS
    ・Electropolished wetted parts
    ・External metal seal construction
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SeriesTypeApplicationBody materialConnection typeConnection size
AP/SLSingle stageDistribution (Compact)316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
AP/SLSingle stageDistribution316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageBulk gas316L SSFace seal
Tube weld
1/2'', 3/4'', 1''
AP/SLSingle stageSource316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageSub-atmospheric pressure316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
APTwo stageSource316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
AZSingle stageDistribution316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''
AZSingle stageSource316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''
AZSingle stageSub-atmospheric pressure316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''

Features

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.

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