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Clean Gas Filters/Air Filters

Clean Air Module LLB

    ・Modularized clean equipment (Reduced piping labor/Space saving)
     Makes clean air easily available
    ・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
    ・Wetted parts: Grease-free, Silicone-free
    ・Assembled in a clean room, Shipped and packed in double packaging
    ・24 combinations are available.

     Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1
SeriesFluidSet pressureFlow range L/min (ANR)
LLB3Clean air
N2 gas Note)
0.05 to 0.4 MPa5 to 100
LLB4Clean air
N2 gas Note)
0.05 to 0.4 MPa50 to 500

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