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Other: RS232C Compatible Products

Thermo-chiller/High-performance Inverter Type HRZ

    ・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
    ・A wide temperature range and cooling capacity range are covered by one unit.
    ・Suited to the short innovation cycle of semiconductor equipment,
    　Capable of responding flexibly to changes in the process conditions
    ・Compliant with UL Standards, SEMI Standards, CE-marking

    ∗ The HRZ series will be discontinued in December 2022.
    　Please select the HRZ-F series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
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  • Thermo-chiller/High-performance Inverter Type HRZ
    Manual
    Series View search result
    HRZView search result
  • Thermo-chiller/High-performance Inverter Type HRZ
    DoC
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    HRZView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRZ−20 to 90℃
10 to 60℃		10 kW±0.1℃Water-cooled
refrigeration		Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

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