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High Vacuum Valves

Aluminum High Vacuum Angle Valve XLA/C/F/G

    ・Aluminum bodied
     Uniform baking temperature
     Lightweight, Compact
     Minimal outgassing
     Minimal contamination from heavy metals
    ・Bellows are replaceable.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLA-2Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
16 to 80
XLAV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
16 to 80
XLC-2Air
operated
Double
acting
Bellows sealDust free,
Cleaned
16 to 80
XLF-2Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation,
High operating cycles
16 to 80
XLFV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation,
High operating cycles
16 to 80
XLG -2Air
operated
Double
acting
O-ring sealHigh-speed operation,
High operating cycles
16 to 80

Features

■Aluminum High Vacuum Angle Valve
■Aluminum bodied

Uniform baking temperature

Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.


Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)

Low outgassing

Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.

Little heavy metal contamination

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

■Possible to replace the bellows
(Bellows seal type)

Bellows assembly can be replaced which reduces maintenance costs and waste materials.

■A model with a solenoid valve has been added. New



■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New

・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator

■Heater is available for option.


For 100/120° C

■Auto switches are mountable from 4 directions.


■High Vacuum Angle Valve Series Variations

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