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Thermo-Chillers (Circulating Fluid Temperature Controllers)

Dual Thermo-chiller/High-performance Inverter Type HRZD

    ・Temperatures for 2 systems can be controlled separately by one chiller.
    ・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump.
    ・Space saving: Footprint reduced by 23%
    ・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
    ・Compliant with SEMI Standards, CE-marking
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRZD−30 to 90℃9.5 kW x 2±0.1℃Water-cooled
refrigeration		Fluorinated,
Ethylene glycol aqueous solution (60%)

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