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Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type

Water-cooled Thermo-chiller/High-performance Type HRW

    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

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