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High Vacuum Valves

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
     Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
     Increased flexibility of mounting orientation
    ・Lightweight, Compact
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SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLA-100/160-X152Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
100,160
XLC-100/160-1-X152Air
operated
Double
acting
Bellows sealDust free,
Cleaned
100,160

Features

■Improved durability of bellows (Flange sizes 100 and 160)
■Service life of two million cycles∗1

 ∗1 The service life is based on SMC's testing. Refer to the operation manual for details.

■Space required for equipment can be reduced
■Lightweight, Compact

Large conductance, small body, excellent
resistance against fluorine corrosion (body)

■Variations

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