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Slit Valves

Slit Valve XGT

    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
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  • Slit Valve XGT
    Manual
    Series View search result
    XGTView search result
SeriesOperating environmental
pressure (Pa)(abs)
FluidOpening window size
(Height x Width)
(mm)
Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6
Inert gas type vacuum32 x 222
46 x 236
50 x 336
0.45 to 0.6

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