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Process Gas Equipment

Diaphragm Valve for Ultra High Purity AZ

    ・Cleaned for high purity semiconductor applications and clean room assembled
    ・Helium leak tested
    ・SEMI Standards compliant
    ・User-friendly forged body
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

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SeriesTypeBody materialConnection typeConnection size
AZAir operated type316L SSFace seal
Tube weld
1/4''
3/8''
1/2
AZManually operated316L SSFace seal
Tube weld
1/4''
3/8''
1/2

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