XMH Series Stainless Steel High Vacuum Angle Valve Manual Valve/Bellows Seal
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Details
Flange Size
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16(16,CF034)
25(25)
40(40,CF070)
50(50)
1
Flange Type
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-(KF(NW))
C(CF)
2
Seal Material
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-(Seal Material:FKM;Compound No.:1349-80)
XF1(Seal Material:FKM;Compound No.:-)
XN1(Seal Material:EPDM;Compound No.:2101-80)
XP1(Seal Material:Barrel Perfluoro;Compound No.:70W)
XQ1(Seal Material:Kalrez;Compound No.:4079)
XR1(Seal Material:Chemraz;Compound No.:SS592)
XR2(Seal Material:Chemraz;Compound No.:SS630)
XR3(Seal Material:Chemraz;Compound No.:SSE38)
XS1(Seal Material:VMQ;Compound No.:1232-70)
XT1(Seal Material:FKM For Plasma;Compound No.:3310-75)
XU1(Seal Material:ULTIC ARMOR;Compound No.:UA4640)
3
Part Numbers Indicating Changed Seal Material And Leakage
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-(Changed Part:-;Leakage:Internal:1.3x10^-10(FKM) Pa·m3/sa or less,External:1.3x10^-11(FKM) Pa·m3/sa or less)
A(Changed Part:Valve Seal (Maintenance Part),Exterior Seal (Maintenance Part);Leakage:Internal:1.3x10^-8 Pa·m3/sa or less,External:1.3x10^-9 Pa·m3/sa or less (Seal material F1: Leakage:Internal:1.3x10^-10 Pa·m3/sa or less,External:1.3x10^-11 Pa·m3/sa or less))
B(Changed Part:Valve Seal (Maintenance Part);Leakage:Internal:1.3x10^-8 Pa·m3/sa or less,External:1.3x10^-11(FKM) Pa·m3/sa or less)
C(Changed Part:Exterior Seal (Maintenance Part);Leakage:Internal:1.3x10^-10(FKM) Pa·m3/sa or less,External:1.3x10^-9 Pa·m3/sa or less)
4
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