XLGR Series Aluminum High Vacuum Angle Valve Normally Closed/O-ring Seal With Bypass Valve
Option configuration
Reset
Details
Flange Size
-- Please select --
80(80)
100(100)
160(160)
1
Flange Type
-- Please select --
-(KF(NW))
D(K(DN))
2
Main Valve:Pilot Port Direction
-- Please select --
-(Flange Side)
K(Left Flange Surface)
L(Rear Flange Surface)
M(Right Flange Surface)
3
Temperature Specifications
-- Please select --
-(5 To 60℃,Without Heater)
H0(5 To 150℃,Without Heater)
4
Auto Switch Type
-- Please select --
-(Without Auto Switch (Without Built-in Magnet))
A90(Reed Auto Switch, Grommet, 2-wire, In-line, Lead Wire :0.5m, Apply Voltage :AC/DC24V or Less,AC/DC48V or Less,AC/DC100V or Less)
A90L(Reed Auto Switch, Grommet, 2-wire, In-line, Lead Wire :3m, Apply Voltage :AC/DC24V or Less,AC/DC48V or Less,AC/DC100V or Less)
A93(Reed Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :0.5m, Apply Voltage :DC24V,AC100V)
A93L(Reed Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :3m, Apply Voltage :DC24V,AC100V)
A93M(Reed Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :1m, Apply Voltage :DC24V,AC100V)
A93Z(Reed Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :5m, Apply Voltage :DC24V,AC100V)
M9//(Without Auto Switch (With Built-in Magnet))
M9B(Solid State Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :0.5m, Apply Voltage :DC24V(DC10~28V))
M9BL(Solid State Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :3m, Apply Voltage :DC24V(DC10~28V))
M9BM(Solid State Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :1m, Apply Voltage :DC24V(DC10~28V))
M9BMAPC(Solid State Auto Switch, With Pre-wired Connector M8-3 pin, With Indicator Light, 2-wire, In-line, Lead Wire :1m, Apply Voltage :DC24V(DC10~28V))
M9BMBPC(Solid State Auto Switch, With Pre-wired Connector M8-4 pin, With Indicator Light, 2-wire, In-line, Lead Wire :1m, Apply Voltage :DC24V(DC10~28V))
M9BMDPC(Solid State Auto Switch, With Pre-wired Connector M12-4 pin, With Indicator Light, 2-wire, In-line, Lead Wire :1m, Apply Voltage :DC24V(DC10~28V))
M9BSAPC(Solid State Auto Switch, With Pre-wired Connector M8-3 pin, With Indicator Light, 2-wire, In-line, Lead Wire :0.5m, Apply Voltage :DC24V(DC10~28V))
M9BSBPC(Solid State Auto Switch, With Pre-wired Connector M8-4 pin, With Indicator Light, 2-wire, In-line, Lead Wire :0.5m, Apply Voltage :DC24V(DC10~28V))
M9BSDPC(Solid State Auto Switch, With Pre-wired Connector M12-4 pin, With Indicator Light, 2-wire, In-line, Lead Wire :0.5m, Apply Voltage :DC24V(DC10~28V))
M9BZ(Solid State Auto Switch, Grommet, With Indicator Light, 2-wire, In-line, Lead Wire :5m, Apply Voltage :DC24V(DC10~28V))
M9N(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NL(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :3m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NM(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NMAPC(Solid State Auto Switch, With Pre-wired Connector M8-3 pin, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NMBPC(Solid State Auto Switch, With Pre-wired Connector M8-4 pin, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NMDPC(Solid State Auto Switch, With Pre-wired Connector M12-4 pin, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NSAPC(Solid State Auto Switch, With Pre-wired Connector M8-3 pin, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NSBPC(Solid State Auto Switch, With Pre-wired Connector M8-4 pin, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NSDPC(Solid State Auto Switch, With Pre-wired Connector M12-4 pin, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9NZ(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (NPN), In-line, Lead Wire :5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9P(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PL(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :3m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PM(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PMAPC(Solid State Auto Switch, With Pre-wired Connector M8-3 pin, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PMBPC(Solid State Auto Switch, With Pre-wired Connector M8-4 pin, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PMDPC(Solid State Auto Switch, With Pre-wired Connector M12-4 pin, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :1m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PSAPC(Solid State Auto Switch, With Pre-wired Connector M8-3 pin, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PSBPC(Solid State Auto Switch, With Pre-wired Connector M8-4 pin, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PSDPC(Solid State Auto Switch, With Pre-wired Connector M12-4 pin, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :0.5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
M9PZ(Solid State Auto Switch, Grommet, With Indicator Light, 3-wire (PNP), In-line, Lead Wire :5m, Apply Voltage :DC5V,12V,24V(DC4.5~28V))
5
Number Of Auto Switches/Detecting Position
-- Please select --
-(Quantity:Without Auto Switch;Detecting Position:-)
A(Quantity:2 pcs.;Detecting Position:Valve Open/Closed)
B(Quantity:1 pc.;Detecting Position:Valve Open)
C(Quantity:1 pc.;Detecting Position:Valve Closed)
6
Bypass Valve Mounting Position
-- Please select --
1(Left Flange Surface)
2(Right Flange Surface)
3(Rear Flange Surface)
7
Pilot Port Direction
-- Please select --
K(Left Flange Surface)
L(Rear Flange Surface)
M(Right Flange Surface)
S(Flange Side)
8
Seal Material
-- Please select --
-(Seal Material:FKM;Compound No.:1349-80)
XF1(Seal Material:FKM;Compound No.:-)
XN1(Seal Material:EPDM;Compound No.:2101-80)
XP1(Seal Material:Barrel Perfluoro;Compound No.:70W)
XQ1(Seal Material:Kalrez;Compound No.:4079)
XR1(Seal Material:Chemraz;Compound No.:SS592)
XR2(Seal Material:Chemraz;Compound No.:SS630)
XR3(Seal Material:Chemraz;Compound No.:SSE38)
XS1(Seal Material:VMQ;Compound No.:1232-70)
XT1(Seal Material:FKM For Plasma;Compound No.:3310-75)
XU1(Seal Material:ULTIC ARMOR;Compound No.:UA4640)
9
Seal Material Changed Part And Leakage
-- Please select --
-(Changed Part:None;Leakage:Internal:1.3x10^-9(FKM) Pa·m3/sa or less,External:1.3x10^-9(FKM) Pa·m3/sa or less)
A(Changed Part:Main Exhaust Valve Valve Seal,Bypass Valve Valve Seal,Main Exhaust Valve External Seal,Bypass Valve External Seal,O-ring For Connection;Leakage:Internal:1.3x10^-7 Pa·m3/sa or less,External:1.3x10^-7 Pa·m3/sa or less (Seal material F1: Leakage:Internal:1.3x10^-9 Pa·m3/sa or less,External:1.3x10^-9 Pa·m3/sa or less))
B(Changed Part:Main Exhaust Valve Valve Seal,Bypass Valve Valve Seal;Leakage:Internal:1.3x10^-7 Pa·m3/sa or less,External:1.3x10^-9(FKM) Pa·m3/sa or less)
C(Changed Part:Main Exhaust Valve External Seal,Bypass Valve External Seal,O-ring For Connection;Leakage:Internal:1.3x10^-9(FKM) Pa·m3/sa or less,External:1.3x10^-7 Pa·m3/sa or less)
10
-- UnSelected
-- Selected
-- Selection invalid
