XGTP Series Parallel Seal Type Slit Valve
Option configuration
Reset
Details
Applicable Wafer Size
-- Please select --
3(For 300 mm Wafer)
1
Number Of Axes And Seal Type
-- Please select --
1(One Axis Bellows)
2
Valve Type
-- Please select --
1(Insert Type (Without Body))
2(Cassette Type (Standard))
3(Cassette Type (Half MESK))
3
Opening Window Size
-- Please select --
50336(50X336 mm)
4
Gate Seal Material
-- Please select --
1(FKM)
2(Kalrez 4079)
F1(FKM)
F2(Kalrez 4079)
5
Auto Switch And The Connector
-- Please select --
-(Auto Switch:None;Connector:None)
A(Auto Switch:D-A93;Connector:None;Lead Wire:0.5 m;Operating Temperature Range: 20°C To 60°C)
C(Auto Switch:D-A93;Connector:Multiple Connector (AMP);Operating Temperature Range: 20°C To 60°C)
F(Auto Switch:D-A93;Connector:D-sub Connecto;Operating Temperature Range: 20°C To 60°C)
6
End Lock
-- Please select --
-(OPEN/CLOSE End Lock)
N(Without End Lock)
7
-- UnSelected
-- Selected
-- Selection invalid
