XGT Series Slit Valve
Option configuration
Reset
Details
Valve Size
-- Please select --
22(Number of Axis:Two Axes Bellows;Applicable Wafer Size:200 mm)
31(Number of Axis:One Axis Bellows;Applicable Wafer Size:300 mm)
1
Valve Type
-- Please select --
1(Non-cassette Type)
2(Cassette Type Standard)
3(Cassette Type Half MESK)
4(Cassette Type Full MESK)
2
Opening Window Size
-- Please select --
32222(Height X Width:32X222 mm;Applicable Wafer Size:200 mm)
46236(Height X Width:46X236 mm;Applicable Wafer Size:200 mm)
50336(Height X Width:50X336 mm;Applicable Wafer Size:300 mm)
3
Gate O-ring Material
-- Please select --
1(FKM)
2(Kalrez 4079)
F1(FKM)
F2(Kalrez 4079)
4
Auto Switch And The Connector
-- Please select --
-(Auto Switch:None;Connector:-)
A(Auto Switch:D-A93(With 2 pcs. For Opening And Closing);Connector:Lead Wire:0.5 m (Without Connector))
C(Auto Switch:D-A93(With 2 pcs. For Opening And Closing);Connector:With Multiple Connector(T3106 000:Made By AMP))
F(Auto Switch:D-A93(With 2 pcs. For Opening And Closing);Connector:With D-sub Connector(CDE-9PF05:Made By HIROSE ELECTRIC CO.,LTD.))
5
-- UnSelected
-- Selected
-- Selection invalid
