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工艺气体元件

减压阀（压力调节器）／背压阀　一般气体用 AK/BP

    ・从半导体到一般行业都可使用的标准型。
    ・主体材质可根据流体选择SUS316或黄铜。
安全注意事项　工艺气体用元件/共通注意事项　扩展品
推荐型号　技术资料/用语解说　环保认证(RoHS)
系列型号用途主体材质配管连接配管尺寸
AK一段式气路用SUS316
或黄铜		NPT内螺纹
卡套式接头		1/4''，3/8''
1/2''
AK一段式一次側高压用SUS316
或黄铜		NPT内螺纹
卡套式接头		1/4''，3/8''
1/2''
AK一段式负压调节SUS316
或黄铜		NPT内螺纹
卡套式接头		1/4''，3/8''
1/2''
AK二段式一次側高压用SUS316
或黄铜		NPT内螺纹
卡套式接头		1/4''
BP背压阀―SUS316
或黄铜		NPT内螺纹
卡套式接头		1/4''

产品特点

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.
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