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Vacuum Angle Valve with Release Valve XLJ

    ・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
    ・Reduced piping labor due to the built-in release valve structure
  • Vacuum Angle Valve with Release Valve XLJ
    Manual
    Series View search result
    XLJView search result
Safety Instructions　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		Flange
size
XLJElectromagneticNormally closed/Vacuum pilotO-ring seal25, 40

Features

Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber

Reduced piping labor due to the built-in release valve structure

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