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Technical Information/Glossary of Terms
|High Vacuum Equipment-Glossary of Terms 1
[Term]Ultimate Pressure
Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pa·m3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor. In particular, a deterioration of exhaust characteristics due to an unclean pump and invasion of the atmospheric moisture can be the major factor.