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Technical Information/Glossary of Terms
|Process Gas Equipment-Glossary of Terms 1
[Term]Inboard leakage
Leakage rate from outside to inside of the products occurring when an internal pressure is less than the external pressure. This can be detected by spraying helium on outside of the products and detecting helium entering into the products from any leak path while internal cavities are evacuated. This detection method conforms to the SEMI standard F1.