Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
HRS
HRS-R
HRS090
HRS200
HRS100/150
HRSH090
HRSH
HRL
HRSE
HRR
HRZ-F
HRZ
HRZ |
Thermo-chiller/High-performance Type HRZ
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers)Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
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・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
---|---|---|---|---|---|
HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |