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Normal Close High Vacuum Solenoid Valve XSA

Process Valves » Compact 2/3 Port Solenoid Valves
High Vacuum Equipment » High Vacuum Valves
    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas
Face seal fitting
Compression fitting
1/4, 3/8
XSANormally closedAir
Inert gas
Rc, NPT female thread1/8, 1/4, 3/8

Aluminum High Vacuum Angle Valve XLA/C/F/G

High Vacuum Equipment » High Vacuum Valves
    ・Aluminum bodied
     Uniform baking temperature
     Lightweight, Compact
     Minimal outgassing
     Minimal contamination from heavy metals
    ・Bellows are replaceable.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLA-2Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
16 to 80
XLAV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust free,
Cleaned
16 to 80
XLC-2Air
operated
Double
acting
Bellows sealDust free,
Cleaned
16 to 80
XLF-2Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation,
High operating cycles
16 to 80
XLFV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation,
High operating cycles
16 to 80
XLG -2Air
operated
Double
acting
O-ring sealHigh-speed operation,
High operating cycles
16 to 80

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