XL□ Series Updated Jan-17
- A model with a solenoid valve has been added. [New]
- A heat-resistant 2-color indicator solid state auto switch has been added to the high-temperature type. [New]
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
・Ambient temperature: Max. 150° C (Sensor)