Equipment Lineup for Physical and Chemical Industry Series Valve type Fluid XVD Normally closed (Open when pressured, Spring seal) Nitrogen, Air, Inert gas, etc. Piping Face seal Compression Port size 1/4" Operating pressure range (Pa) Series Fluid XGT Atmospheric pressure to 1 x 10.6 Inert gas type vacuum Gate size (Height x Width) 32 x 222 46 x 236 50 x 336 Operating pressure (MPa) 0.45 to 0.6 !With the valve and needle valve all in one unit, takes up 1/4 the space of conventional models !Major reduction in particles through the use of a metal diaphragm in the sheet portion !The flow rate of both initial air supply and main air supply can be adjusted. Smooth Vent Valve XVD !Suitable for use as a block disk between the load lock chamber and transfer chamber, or the transfer chamber and process chamber, of semiconductor equipment Slit Valve XGT Electric Actuator/Slider Type LEF Type Stroke (mm) Work load (kg) Horizontal Speed (mm/s) Screw lead (mm) Actuation type Specifications Controller series Step motor (Servo/24 VDC) ±0.02 ±0.1 LECP6 LECP1 LECPA Servo motor (24 VDC) Ball Screw Drive Step motor (Servo/24 VDC) Belt Drive LECA6 Servo motor (24 VDC) LECA6 LECP6 LECP1 LECPA AC servo motor (100 W/200 W/400 W) LEFS16 LEFS25 LEFS32 LEFS40 LEFS16A LEFS25A LEFB16 LEFB25 LEFB32 LEFB16A LEFB25A LEFS25S LEFS32S LEFS40S 100 to 400 100 to 600 100 to 800 200 to 1000 100 to 400 100 to 600 300 to 1000 300 to 2000 300 to 2000 300 to 1000 300 to 2000 100 to 600 100 to 800 200 to 1000 ±0.02 LECSA LECSB LECSC LECSS Ball Screw Drive Ball Screw Drive Belt Drive Ball Screw Drive Positioning repeatability (mm) 9 10 20 20 40 45 50 60 7 10 11 18 1 5 14 1 2 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 . 23 2 4 2.5 5 . 8 15 10 20 15 30 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 10 to 500 5 to 250 12 to 500 6 to 250 48 to 1100 48 to 1400 48 to 1500 48 to 2000 MAX.900 MAX.450 MAX.1000 MAX.500 MAX.1000 MAX.500 10 5 12 6 16 8 20 10 10 5 12 6 48 48 12 6 16 8 20 10 Electric Actuators 31