Equipment Lineup for Physical and Chemical Industry Series Cooling capacity Circulating liquid HEA 22 W Temperature stability ±0.1 Cooling method Peltier-type air cooled Set temperature range 0 to 50 Air !For temperature control of compressed air at small flow rate Peltier-type Air-thermo HEA Temperature Control Equipment High Vacuum Equipment Outlet air temperature adjustment range Temperature control Series method IDH�ｮ4 IDH�ｮ6 15 to 30 Outlet air set pressure range 0.15 to 0.85 MPa Outlet air temperature stability ±0.1 Air flow capacity m3/min (ANR) 100 to 500 200 to 800 Heater operation PID control !Discharges the compressed air after it has been dehumidified and temperature-controlled. Thermo-dryer with Air Temperature Adjustment Function IDH�ｮ !Strong against fluorine !Minimal gas emissions !Minimal heavy metal contamination Aluminum High Vacuum Angle Valve XL�ｮ !All-in-one integrated structure with high-precision casting, no gas buildup !Mounting interchangeable with Aluminum High Vacuum Angle Valve Series XL (Series XM) Stainless Steel High Vacuum Angle/In-line Valve XM/XY Shaft seal system Actuation Flange size Series XLA XLAV(With solenoid valve) XLC XLCV(With solenoid valve) XLF XLFV(With solenoid valve) XLG XLGV(With solenoid valve) XLD XLDV(With solenoid valve) XLH XLS Valve type Material Air operated Manual Electromagnetic Bellows seal O-ring seal Bellows seal O-ring seal Bellows seal Pressure balanced bellow seal Single acting (N.C.) Double acting Single acting (N.C.) Double acting Single acting (N.C.) Manual Single acting (N.C.) Body: Aluminum alloy Bellows: Stainless steel 316L Body: Aluminum alloy Body: Aluminum alloy Bellows: Stainless steel 316L Body: Aluminum alloy Bellows: Stainless steel 316L 16 to 160 16 to 160 16 to 160 25 to 160 16 to 50 16, 25 Shaft seal system Actuation Flange size Series Angle In-line Valve type Material Air operated Manual Bellows seal Single acting (N.C.) Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L 16 to 80Note) 25 to 80 16 to 50Note) XYA XYC XYD XYH Bellows seal Bellows seal O-ring seal Single acting (N.C.) Manual Double acting Note) Size 16 is not available for In-line type. XMA XMC XMD XMH 30