Equipment Lineup for Physical and Chemical Industry Series Cooling capacity Circulating liquid HRZD 9.5 kW x 2 Temperature stability ±0.1°C Cooling method Water-cooled refrigeration Set temperature range .30 to 90°C Fluorinated liquid Series Cooling capacity Circulating liquid HRW 2 to 30 kW Temperature stability ±0.3°C Cooling method Water-cooled refrigeration Set temperature range 20 to 90°C Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution !Temperature for two systems can be controlled separately by one chiller. !Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump. !Space saving: Footprint reduced by 23 % !Reduced wiring, piping and labor: Single power cable, single facility-water piping system !CE-marking Refrigerated Dual Thermo-chiller HRZD !Direct heat exchanger for water circulated within a plant !For temperature regulation within the temperature range where no freezer is needed !Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal. !Conforms to UL and SEMI specifications, CE-marking. !Inverter type can be selected. Water-cooled Thermo-chiller HRW (Double inverter type) (High-performance chiller (Water-cooled type) Series Cooling capacity Circulating liquid HEC 230, 600W 140, 320, 600, 1200 W Temperature stability ±0.01 to 0.03°C ±0.01 to 0.03°C Cooling method Peltier-type air cooled Peltier-type water cooled Set temperature range 10 to 60°C Clear water Clear water, Fluorinated liquid !For applications requiring high-precision temperature control !High-precision, refrigerant-free temperature control equipment employing Peltier elements !Simple structure and high reliability !Can easily be built into equipments with compact and low-vibration design !Compatible with wide range of power supply voltages !Conforms to UL specifications, CE-marking. Peltier-type Thermo-con HEC High-precision chiller Series Cooling capacity 300 W Temperature stability ±0.04°C Cooling method Peltier-type air cooled Set temperature range Series Cooling capacity Circulating liquid HED 300 to 750 W Temperature stability ±0.1°C Cooling method Peltier-type water cooled Set temperature range 10 to 60°C . 0 to 60°C Deionized water, Chemical liquids Peltier-type Thermoelectric Bath INR-244-757 !Heat exchanger employs Peltier elements for direct temperature control of chemical liquids. !Fluoropolymer heat exchanger is suitable for a wide range of chemical liquids. !Conforms to UL specifications, CE-marking. Peltier-type Chemical Thermo-con HED Fluoropolymer temperature control equipment for chemical liquids Series Cooling capacity Circulating liquid HEB 140 W Temperature stability ±0.1°C Cooling method Peltier-type water cooled Set temperature range .15 to 60°C Clear water, Fluorinated aqueous liquid !High-precision temperature-regulation thermostatic chamber that employs Peltier elements !Compact and low vibration !Unique agitation method keeps up-down temperature distribution to a minimum. Peltier-type Thermoelectric Bath HEB High-precision thermoelectric bath Series Cooling capacity Circulating liquid HRZ 1 to 15 kW Temperature stability ±0.1°C Cooling method Water-cooled refrigeration Set temperature range .20 to 40°C 20 to 90°C .20 to 90°C Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution Series Cooling capacity Circulating liquid HRZ 1.8 to 10 kW Temperature stability ±0.1°C Cooling method Water-cooled refrigeration Set temperature range .20 to 90°C Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution !Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal. !All models conform to safety standards. !Conforms to UL and SEMI specifications, CE-marking. Refrigerated Thermo-chiller HRZ !In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency. !Wide temperature range and cooling capacity range covered by one unit !Suited to the short innovation cycle of semiconductor equipment, and capable of responding flexibly to changes in the process conditions. !Conforms to UL and SEMI specifications, CE-marking. Refrigerated Thermo-chiller HRZ High-performance chiller (High-performance chiller (Built-in inverter) Thermoelectric Bath 29