Equipment Lineup for Physical and Chemical Industry Process Gas Equipment !For UHP gas delivery in semiconductor and other clean industries. !Body material: Stainless steel 316L secondary remelt or Stainless steel 316L !Wetted parts material: Electropolish !External metal seal construction Regulator/Back Pressure Regulator for Ultra High Purity AP/SL/AZ/BP Series Connection size AP/SL AP AZ BP Distribution (Compact) Distribution Bulk gas delivery Source Sub-atmospheric Source Distribution Source Sub-atmospheric . Body material Stainless steel 316L secondary remelt Connection type Face seal Tube stub 1/4", 3/8" 1/4", 3/8", 1/2", 3/4" 1/2", 3/4", 1" Single stage Two stage Single stage Back pressure regulator Stainless steel 316L Stainless steel 316L secondary remelt Stainless steel 316L secondary remelt Stainless steel 316L 1/4", 3/8" 1/2", 3/4" 1/4", 3/8" 1/4", 3/8" 1/2" 1/4", 3/8" !For wide variety of applications from semiconductor to general !Body material Stainless steel 316 or brass available depending on gas Regulator/Back Pressure Regulator for General Applications AK/BP Series Connection size AK BP Distribution Source Sub-atmospheric Source . Body material Stainless steel 316 Brass Connection type NPT, Compression fitting 1/4", 3/8" 1/2" Single stage Two stage Back pressure regulator 1/4" 1/4" !For UHP gas delivery in semiconductor and other clean industries. !Shut off valve which uses a diaphragm for a moving element to open and close the valve. !Springless diaphragm valves do not have a wetted spring. Diaphragm Valve for Ultra High Purity AP Series Connection size AP Body material Stainless steel 316L secondary remelt Connection type Face seal Tube stub 1/4", 3/8" 1/2", 3/4" Air operated type Manually operated type . 1/2: Machined type/Tube weld only Series Body material Connection size AZ Stainless steel 316L 1/4, 3/8 1/2. Connection type Face seal !Cleaned for high purity semiconductor applications. !Cleanroom assembled and He leaked tested. !Valve meets dimensional requirements of SEMI Standard. !User-friendly forged body Diaphragm Valve for Ultra High Purity AZ Air operated type Manually operated type [Check Valve] !To prevent reverse flow. !Unique design with only one moving part in the gas stream, an O-ring. !It is a springless design, free of springs and poppets. [Vacuum Generator] !Vacuum generator !Applicable to emission of unnecessary gas remaining inside piping during replacement of gas cylinder. [Flow Switch] !It detects excess flow above a given flow rate, caused by pipe breakage etc. Check Valve/Vacuum Generator/Flow Switch AP Series Body material Connection size AP 1/4", 3/8" 1/2", 3/4" Connection type Face seal Tube stub Check valve Vacuum generator Flow switch Stainless steel 316L secondary remelt, Stainless steel 316L Stainless steel 316L Stainless steel 316L secondary remelt, Stainless steel 316L 27