q w e r t r2 Port Valve qPump wRegulator eFlow Switch tRestrictor Series SRF �傘ort size Integral fitting: Applicable tubing O.D. o4 to o19 Tube extension: 1/4" to 3/4" �惨et pressure range 0.02 to 0.4 MPa Series LV �傘ort size Thread: (1/8 to 1)/6A to 25A Integral fitting: Applicable tubing O.D. o3 to o25 Tube extension: o3 to o25 �三rifice diameter o2 to o22 Series LVP �拶pplicable tubing O.D. 16A, 20A, 25A �三rifice diameter o16, o22 Process Pump: Series PAF �札ischarge flow rate 1 to 45 L/min �傘ort size Thread: (3/8, 3/4)/10A, 20A Tube extension: 1/2", 3/4" With nut: Connection fitting size 4 or 5 (LQ1, LQ3) Series PF2D �皿easurement flow rate 0.4 to 40 L/min �傘ort size Tube extension: 3/8" to 3/4" Series PF3W �皿easurement flow rate (L/min) 10 to 100, 30 to 250 �傘ort size PVC tubing O.D. 25A, 30A Needle Valve: Series LVN �傘ort size Integral fitting: Applicable tubing O.D. o4 to o12 �三rifice diameter o4.4 to o10 Piping Equipment Quick Drain Valve: Series LVW �拶pplicable tubing O.D. o32 to o89 (25A to 80A) “Deionized Water/Chemical Liquids” Line Fluoropolymer Fittings: Series LQ Fluoropolymer Tubing: Series TH/TL/TD/TLM/TQ Production Facility Pneumatic Instrumentation Equipment/Piping Equipment for Facilities Liquid discharge Pressure adjustment Flow rate detection Liquid discharge Flow rate adjustment 10