Clean Air Module N2 Bomb q w e t y r Nitrogen qRegulator w2 Port Valve tClean Gas Filter yClean Air Module Series VX �三rifice diameter o3 to o50 �傘ort size Thread: 6A to 50A (1/8 to 2) Flange: 32A to 50A Series ISE �山ated pressure range .0.100 to 1.000 MPa �傘ort size M5, 6A (1/8), 8A (1/4) Series SRH �惨et pressure range 0.05 to 0.7 MPa �傘ort size 6A to 15A (1/8 to 1/2) Series AP/AZ/AK Series LLB �薩iltration accuracy 0.01 μm �傘ort size 8A to 10A (1/4 to 3/8) rPressure Switch Series SF �薩iltration accuracy 0.01 μm �傘ort size 8A to 10A (1/4 to 3/8) Piping Equipment eFlow Switch Series PF2A �皿easurement flow rate (L/min) 1 to 10, 5 to 50, 10 to 100, 20 to 200 50 to 500, 150 to 3000 300 to 6000, 600 to 12000 �傘ort size 6A to 50A (1/8 to 2) Stainless Steel 316 Fittings: Series KQG2/KFG2 Clean One-touch Fittings: Series KP Fluoropolymer Tubing: Series TH/TL/TD/TLM/TQ Clean Tubing: Series TPH/TPS “Inert Gas” “Clean Dry Air” Line A flow switch, regulator, 2 port valve, restrictor, and filter have been combined into a single unit. Easily obtains clean air. Pressure adjustment /Filtration Flow rate detection Fluid control Pressure detection Particle separation Modularization 9