Pneumatic Equipment for Clean Room Particle Generation Measuring Method The particle generation data for SMC Clean Series are measured in the following test method. Air cleaning system Clean gas filter Clean gas filter Supply rate 15 l/min Exhausted from relief port Laser dust monitor (Suction flow rate 15 l/min) Particle generation measuring circuit Chamber Measuring instrument Setting conditions Internal volume Supply air quality Same quality as the supply air for driving Description Laser dust monitor (Automatic particle counter by light-scattering method) Model no. Minimum measurable particle diameter Suction flow rate Manufacturer Sampling time Interval time Sampling air flow TS-1500 0.17 μm 15 l/min Hitachi Electronics Engineering Co. Ltd. 5 min 55 min 75 l 15 l Clean bench (ISO Class 5 equivalent)  Particle generation characteristics of CM2  Particle generation characteristics of CY3B  Particle generation characteristics of CXSL Evaluation Method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m3. When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range. Note 1) Sampling air flow rate: Number of particles contained in 75 l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle diameter (μm) 106 105 104 103 102 10 1 0.1 0.5 Particle concentration (particles/m3) 10-CM2 11-CM2 Standard product 1 Particle diameter (μm) 106 105 104 103 102 10 1 11-CXSL 12-CXSL Standard product Particle concentration (particles/m3) 0.1 0.5 1 Particle diameter (μm) 106 105 104 103 102 10 1 0.1 0.5 1 Particle concentration (particles/m3) 12-CY3B Standard product Measuring Conditions Test Method (Example) Place the specimen in the acrylic resin chamber and operate it while supplying the same flow rate of clean air as the suction flow rate of the measuring instrument (15 l/min). Measure the changes of the particle concentration over time until the number of cycles reaches the specified point. The chamber is placed in an ISO Class 5 equivalent clean bench. 85