Pneumatic Equipment for Clean Room Flow Control Equipment Description Speed controller Elbow type/Universal type Speed controller In-line type Clean speed controller Stainless steel speed controller Elbow type/Universal type Stainless steel speed controller In-line type Stainless steel dual speed controller Speed controller for low speed operation Elbow type/Universal type Speed controller for low speed operation In-line type Dual speed controller for low speed operation Metal body speed controller Elbow type Metal body speed controller In-line type Dual speed controller 10-AS-F 10-AS-F 10-ASD 10-AS-FG 10-AS-FG 10-ASD-FG 10-AS-FM 10-AS-FM 10-ASD-FM 10-AS12 to 42 10-AS1000 to 5000 (21-)AS-FPQ (21-)AS-FPG Series Particle generation grade by series 21- 3 3 3 3 3 3 3 3 3 1 1 4 4 4 4 4 4 4 4 4 3 3 1 1 1 1 Standard 10- Particle Generation Grade Values in show grades. No grade applies to blanks. 83